Lemkin, M.; Boser, B.E. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics. IEEE J. Solid-State Circuits 1999, 34, 456-468.
Jiang, X.; Seeger, J.I.; Kraft, M.; Boser, B.E. A monolithic surface micromachined Z-axis gyroscope with digital output. In Proceedings of the 2000 Symposium on VLSI Circuits, Honolulu, HI, USA, 15-17 June 2000; pp. 16-19.
Kraft, M.; Lewis, C.P.; Hesketh, T.G. Closed loop silicon accelerometers. IEEE Proc. Circuits Devices Syst. 1998, 145, 325-331.
Norsworth, S.N.; Schreier, R.; Temes, C. Delta-Sigma Data Converters, Theory, Design, and Simulation; IEEE Press: Piscataway, NJ, USA, 1997.
Smith, T.; Nys, O.; Chevroulet, M.; DeCoulon, Y.; Degrauwe, M. A 15 b electromechanical Sigma-Delta converter for acceleration measurements. In Proceedings of the IEEE International Solid-State Circuits Conference (ISSCC'94), San Francisco, CA, USA, 16-18 February 1994; pp. 160-161.
Kajita, T.; Moon, U.-K.; Temes, G.C. A two-chip interface for a MEMS accelerometer. IEEE Trans. Instrum. Meas. 2002, 51, 853-858.
Dong, Y.; Kraft, M.; Gollasch, C.O. A high performance accelerometer with fifth order sigma delta modulator. J. Micromech. Microeng. 2005, 15, S22-S29.
Dong, Y.; Kraft, M.; Redman-White, W. Force feedback linearization for higher-order electromechanical Sigma-Delta modulators. J. Micromech. Microeng. 2006, 16, S54-S60.
Petkov, V.; Boser, B.E. A fourth-order interface for micromachined inertial sensors. IEEE J. Solid State Circuits 2005, 40, 1602-1609.
Dong, Y.; Kraft, M.; Hedenstierna, N.; Redman-White, W. Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator. Sens. Actuat. A 2008, 145, 299-305.
Raman, J.; Rombouts, P.; Weyten, L. An unconstrained architecture for systematic design of higher order Sigma Delta force-feedback loops. IEEE Trans. Circuits Syst. I 2008, 55, 1601-1614.
Raman, J.; Cretu, E.; Rombouts, P.; Weyten, L. A closed-loop digitally controlled MEMS gyroscope with unconstrained sigma-delta force-feedback. IEEE Sens. J. 2009, 9, 297-305.
Dong, Y.; Kraft, M.; Redman-White, W. High order noise shaping filters for high performance inertial sensors. IEEE Trans. Instrum. Meas. 2007, 56, 1666-1674.
Dong, Y.; Kraft, M.; Redman-White, W. Micromachined vibratory gyroscopes controlled by a high order band-pass sigma delta modulator. IEEE Sens. J. 2007, 7, 59-69.
Ardalan, S.; Paulos, J. An analysis of nonlinear behavior in Delta-Sigma modulators. IEEE Trans. Circuits Syst. 1987, 34, 593-603.
Schreier, R. Delta Sigma Toolbox, MatLab File Exchange. Available online: http://www.mathworks.com/matlabcentral/fileexchange/19-delta-sigma-toolbox (accessed on 4 July 2011).
Lota, J.; Al-Janabi, M.; Kale, I. Nonlinear-stability analysis of higher order Δ-Σ modulators for DC and sinusoidal inputs. IEEE Trans. Instrum. Meas. 2008, 57, 530-542.
Deb, K. Multi-Objective Optimization Using Evolutionary Algorithms; John Wiley & Sons Ltd.: Hoboken, NJ, USA, 2001.
Horn, J.; Nafpliotis, N.; Goldberg, D. A niched pareto genetic algorithm for multiobjective optimization. In Proceedings of the 1st IEEE Conference on Evolutionary Computation, Orlando, FL, USA, 27-29 June 1994; Volume 1, pp. 82-87.
Deb, K.; Pratap, A.; Agarwal, S.; Meyarivan, T. A fast and elitist multiobjective Genetic Algorithm: NSGA-II. IEEE Trans. Evol. Comput. 2002, 6, 182-197.
Engesser, M.; Buhmann, A.; Franke, A.R.; Korvink, J.G. Efficient reliability-based design optimization for microelectromechanical systems. IEEE Sens. J. 2009, 10, 1383-1390.
Seeger, J.I.; Jiang, X.; Kraft, M.; Boser, B.E. Sense finger dynamics in a ΣΔ force feedback gyroscope. In Proceedings of the Technical Digest of the 2000 Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 4-8 June 2000; pp. 296-299.
Ding, H.; Liu, X.; Cui, J.; Chi, X.; Lin, L.; Kraft, M.; Yang, Z.; Yan, G. A high-resolution Silicon-on-glass Z-axis gyroscope operating at atmospheric pressure. IEEE Sens. J. 2010, 10, 1066-1074.
Maurino, R.; Mole, P. A 200 MHz IF 11-bit fourth-order bandpass sigmadelta ADC in SiGe. IEEE J. Solid State Circuits 2000, 3, 959-967.
Luo, J.; Ding, H.; Kraft, M. A new design methodology for electro-mechanical Sigma-Delta modulators. In Proceedings of the 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS'09), Shenzhen, China, 5-8 January 2009; pp. 881-884.