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Kraft Michael

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Main Referenced Co-authors
Moktadir, Zakaria (20)
Lewis, Christopher P. (17)
Hinds, Edward A. (15)
Hesketh, Thomas G. (14)
Dong, Yufeng (13)
Main Referenced Keywords
Accelerometers (5); Electrostatic force (3); MEMS (3); Bandwidth (2); Capacitance (2);
Main Referenced Unit & Research Centers
Microsys (1)
Service Public de Wallonie (SPW) (1)
Main Referenced Disciplines
Electrical & electronics engineering (244)
Physics (3)
Engineering, computing & technology: Multidisciplinary, general & others (2)
Physical, chemical, mathematical & earth Sciences: Multidisciplinary, general & others (1)

Publications (total 247)

The most downloaded
4128 downloads
Koukharenka, A., Kraft, M., Ensell, G., & Hollinshead, N. (2005). A comparative study of four thick photoresists for MEMS applications. Journal Material Science: Materials in Electronics, 16 (11-12). https://hdl.handle.net/2268/196903

The most cited

160 citations (OpenAlex)

Zhang, H. M., Yuan, W. Z., Li, B. Y., Hao, Y. C., Kraft, M., & Chang, H. (2016). An acceleration sensing method based on the mode localization of weakly coupled resonators. Journal of Microelectromechanical Systems, 25 (2), 286-296. doi:10.1109/JMEMS.2015.2514092 https://hdl.handle.net/2268/196896

Wang, C., Wang, Y., Fang, W., Song, X., Quan, A., Gidts, M., Zhang, H., Liu, H., Bai, J., Sadeghpour, S., & Kraft, M. (2022). Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm. Microsystems and Nanoengineering, 8 (1), 3. doi:10.1038/s41378-021-00336-0
Peer Reviewed verified by ORBi

Wang, C., Quan, A., Fang, W., Huang, H., Wang, L., Gidts, M., Guan, Y., Liu, H., Zhang, H., Bai, J., Wang, Y., & Kraft, M. (2022). A Mems Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 774-777). Institute of Electrical and Electronics Engineers Inc. doi:10.1109/MEMS51670.2022.9699829

Stoukatch, S., Francis, L., Dupont, F., & Kraft, M. (March 2021). Low-cost microfluidic device micromachining and sequential integration with SAW sensor intended for biomedical applications. IEEE Sensors Journal, Volume 319. doi:10.1016/j.sna.2020.112526
Peer reviewed

Wang, Y., Liu, H., Wang, C., Zhao, C., Redouté, J.-M., Stoukatch, S., Xiao, Q., Tu, L., & Kraft, M. (2021). Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor with a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor. IEEE Sensors Journal. doi:10.1109/JSEN.2021.3052046
Peer Reviewed verified by ORBi

Wang, C., Song, X., Fang, W., Chen, F., Zeimpekis, I., Wang, Y., Quan, A., Bai, J., Liu, H., Schropfer, G., Welham, C., & Kraft, M. (2020). Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm. Microsystems and Nanoengineering, 6 (1). doi:10.1038/s41378-020-00214-1
Peer Reviewed verified by ORBi

Wang, C., Chen, F., Wang, Y., Sadeghpour, S., Wang, C., Baijot, M., Esteves, R., Zhao, C., Bai, J., Liu, H., & Kraft, M. (2020). Micromachined accelerometers with sub-µg/ Hz noise floor: A review. Sensors, 20 (14). doi:10.3390/s20144054
Peer Reviewed verified by ORBi

Xiao, Q., Wang, Y., Dricot, S., & Kraft, M. (2019). Design and experiment of an electromagnetic levitation system for a micro mirror. Microsystem Technologies, 25 (8), 3119-3128. doi:10.1007/s00542-019-04452-w
Peer Reviewed verified by ORBi

Bellier, P., Laurent, P., Stoukatch, S., Dupont, F., Joris, L., & Kraft, M. (2018). Autonomous micro-platform for multisensors with an advanced power management unit (PMU). Journal of Sensors and Sensor Systems, 7 (1), 299-308. doi:10.5194/jsss-7-299-2018
Peer Reviewed verified by ORBi

Laurent, P., Stoukatch, S., Dupont, F., & Kraft, M. (2018). Electrical characterization of Aerosol Jet Printing (AJP) deposited conductive silver tracks on organic materials. Microelectronic Engineering, 197, 67-75. doi:10.1016/j.mee.2018.06.002
Peer Reviewed verified by ORBi

Dupont, F., Stoukatch, S., Laurent, P., Dricot, S., & Kraft, M. (January 2018). 355nm UV laser patterning and post-processing of FR4 PCB for fine pitch components integration. Optics and Lasers in Engineering, 100, 186-194. doi:10.1016/j.optlaseng.2017.08.014
Peer Reviewed verified by ORBi

Wang, Y., Zhao, C., Wang, C., Cerica, D., Baijot, M., Pachkawade, V., Ghorbani, A., Boutier, M., & Kraft, M. (2017). A Reversible Method to Characterize the Mass Sensitivity of a 3-Dof Mode Localized Coupled Resonator under Atmospheric Pressure. Proceedings Eurosensors. doi:10.3390/proceedings1040493
Peer reviewed

Colson, G., Laurent, P., Bellier, P., Stoukatch, S., Dupont, F., & Kraft, M. (10 May 2017). Smart-shoes self-powered by walking [Poster presentation]. Body sensor networks, Eindhoven, Netherlands.

Mross, S., Zimmermann, T., Zenzes, S., Kraft, M., & Vogt, H. (2017). Study of enzyme sensors with wide, adjustable measurement ranges for in-situ monitoring of biotechnological processes. Sensors and Actuators. B, Chemical, 241, 48-54. doi:10.1016/j.snb.2016.10.054
Peer Reviewed verified by ORBi

Zhao, C., Wood, G. S., Hui Pu, S., & Kraft, M. (2017). A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators. Journal of Sensors and Sensor Systems, 6 (1), 1-8. doi:10.5194/jsss-6-1-2017
Peer Reviewed verified by ORBi

Utz, A., Walk, C., Haas, N., Fedtschenko, T., Stanitzki, A., Mokhtari, M., Görtz, M., Kraft, M., & Kokozinski, R. (2017). An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 μm CMOS. Journal of Sensors and Sensor Systems, 6 (2), 285-301. doi:10.5194/jsss-6-285-2017
Peer Reviewed verified by ORBi

Utz, A., Walk, C., Stanitzki, A., Mokhtari, M., Kraft, M., & Kokozinski, R. (2017). A high precision MEMS based capacitive accelerometer for seismic measurements. Proceedings of IEEE Sensors, 2017-December, 1-3. doi:10.1109/ICSENS.2017.8233981
Peer Reviewed verified by ORBi

Chen, F., Zhao, Y., Zou, H., Kraft, M., & Li, X. (2017). A front-side non-soi fabricated tri-axis capacitive accelerometer with electromechanical sigma-delta modulators interface. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 930-933). Institute of Electrical and Electronics Engineers Inc. doi:10.1109/TRANSDUCERS.2017.7994202

Van Loo, S., Stoukatch, S., Kraft, M., & Gilet, T. (12 October 2016). Droplet formation by squeezing in a microfluidic cross-junction. Microfluidics and Nanofluidics, 20 (10), 1-12. doi:10.1007/s10404-016-1807-1
Peer Reviewed verified by ORBi

Van Loo, S., Stoukatch, S., Kraft, M., & Gilet, T. (07 September 2016). How do droplets form? [Poster presentation]. 1st International Conference on Multiscale Applications of Surface Tension, Bruxelles, Belgium.

Wood, G., Chun, Z., Pu, S., Boden, S., Sari, I., & Kraft, M. (2016). Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process. Microelectronic Engineering, 159, 169-173. doi:10.1016/j.mee.2016.03.035
Peer Reviewed verified by ORBi

Pachkawade, V., Junghare, R., Patrikar, R., & Kraft, M. (2016). Mechanically-coupled ring-resonator filter and array (analytical and finite element model). IET Computers and Digital Techniques. doi:10.1049/iet-cdt.2015.0202
Peer Reviewed verified by ORBi

Mross, S., Zimmermann, T., Winkin, N., Kraft, M., & Vogt, H. (2016). Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites, cell density and pH in biotechnological processes. Sensors and Actuators. B, Chemical. doi:10.1016/j.snb.2016.03.086
Peer Reviewed verified by ORBi

Zhang, H. M., Yuan, W. Z., Li, B. Y., Hao, Y. C., Kraft, M., & Chang, H. (2016). An acceleration sensing method based on the mode localization of weakly coupled resonators. Journal of Microelectromechanical Systems, 25 (2), 286-296. doi:10.1109/JMEMS.2015.2514092
Peer Reviewed verified by ORBi

Wood, G., Chun, Z., Pu, S., Boden, S., Sari, & Kraft, M. (2016). An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization. IEEE Sensors Journal. doi:10.1109/JSEN.2016.2573850
Peer Reviewed verified by ORBi

Zhao, C., Wood, G., Xie, J. B., Chang, H., Pu, S., & Kraft, M. (2016). Comparative study of output metrics for A MEMS resonant sensor consisting of three weakly coupled resonators. Journal of Microelectromechanical Systems. doi:10.1109/JMEMS.2016.2580529
Peer Reviewed verified by ORBi

Chen, F., Li, X., & Kraft, M. (2016). Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review. IEEE Sensors Journal. doi:10.1109/JSEN.2016.2582198
Peer Reviewed verified by ORBi

Wood, G., Zhao, C., Pu, S., Sari, I., & Kraft, M. (2015). Sensor based on the mode-localization effect in electrostatically-coupled MEMS resonators fabricated using an SOI process. In Proceedings of the IEEE Sensors Conference, Nov. 2015. Busan, South Korea: IEEE. doi:10.1109/ICSENS.2015.7370338
Peer reviewed

Almutairy, B., & Kraft, M. (2015). MASH2-0 electromechanical sigma-delta modulator for capacitive MEMS sensors with digital filter calibration using simulated annealing. In Proceedings of the IEEE Sensors Conference, Nov. 2015. doi:10.1109/ICSENS.2015.7370604
Peer reviewed

Mross, S., Zimmerman, T., Winkin, N., Kraft, M., & Vogt, H. (2015). Integrated multi-sensor system for parallel in-situ monitoring of cell nutrients, metabolites and cell mass in biotechnological processes. In Proc. Eurosensors, CS02-1. doi:10.1016/j.proeng.2015.08.642
Peer reviewed

Almutairi, B., Alsheri, A., & Kraft, M. (2015). Design and implementation of a MASH2-0 Electromechanical Sigma-Delta Modulator for capacitive MEMS sensors using dual quantization method. Journal of Microelectromechanical Systems. doi:10.1109/JMEMS.2015.2443077
Peer Reviewed verified by ORBi

Wood, G., Chun, Z., Pu, S., Boden, S., Sari, I., & Kraft, M. (2015). Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process. In Proceedings 41st Micro and Nano Engineering Conference.
Peer reviewed

Zhao, C., Wood, G., Pu, S., & Kraft, M. (2015). A feasibility study for a self-oscillating loop for a three degree of freedom coupled MEMS resonator force sensor. In Proc. Eurosensors MP-L01. doi:10.1016/j.proeng.2015.08.766
Peer reviewed

Zhao, C., Wood, G., Xie, J. B., Chang, H., Pu, S., & Kraft, M. (01 August 2015). A force sensor based on three weakly coupled resonators with ultrahigh sensitivity. Sensors and Actuators. A, Physical, 232, 151-162. doi:10.1016/j.sna.2015.05.011
Peer Reviewed verified by ORBi

Zhao, C., Wood, G., Xie, J. B., Chang, H., Pu, S., & Kraft, M. (2015). Comparative study of different output metrics for a three weakly coupled resonator sensor. In Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015). doi:10.1109/TRANSDUCERS.2015.7181396
Peer reviewed

Montaseri, M., Xie, J. B., Chang, H., Zhao, C., Wood, G., & Kraft, M. (2015). Atmospheric pressure mode localization coupled resonators stiffness sensor. In Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015).
Peer reviewed

Zhang, H., Yuan, W. Z., Li, B. Y., Hao, Y. C., Kraft, M., & Chang, H. (2015). A novel resonant accelerometer based on model localization of weakly coupled resonators. In Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015). doi:10.1109/TRANSDUCERS.2015.7181112
Peer reviewed

Walk, C., Goehlich, A., Giese, A., Goertz, M., Vogt, H., & Kraft, M. (2015). Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor. In Proc. SPIE Microtechnologies, Smart Sensors, Actuators, and MEMS VII. doi:10.1117/12.2176188
Peer reviewed

Mross, S., Fuerst, P., Pierrat, S., Vogt, H., & Kraft, M. (2015). Enzyme sensor with Polydimethylsiloxane membrane and CMOS potentiostat for wide-range glucose measurements. IEEE Sensors Journal, 15 (12), 7096-7104. doi:10.1109/JSEN.2015.2470111
Peer Reviewed verified by ORBi

Sari, I., & Kraft, M. (2015). A linear accelerator for levitated micro-objects. Sensors and Actuators. A, Physical. doi:10.1016/j.sna.2014.11.008
Peer Reviewed verified by ORBi

Zhao, C., Wood, G., Xie, J., Chang, H., Pu, S., Chong, H., & Kraft, M. (2015). A sensor for stiffness change sensing based on three coupled resonators with enhanced sensitivity. In Proceedings of "IEEE MEMS Conf. : Portugal - Janvier 2015".
Peer reviewed

Ghoshdastider, U., Viga, R., & Kraft, M. (2015). Experimental evaluation of a pairwise broadcast synchronization in a low-power cyber-physical system. In Proceedings of "Radio Wireless Week : San Diego - Janvier 2015".
Peer reviewed

Zhao, C., Wood, G., Xie, J. B., Chang, H., Pu, S., & Kraft, M. (2015). A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity. Journal of Microelectromechanical Systems, 25 (1), 38-51. doi:10.1109/JMEMS.2015.2490204
Peer Reviewed verified by ORBi

Mross, S., Pierrat, S., Zimmermann, T., & Kraft, M. (2015). Microfluidic Enzymatic Biosensing Systems: a Review. Biosensors and Bioelectronics, 70, 376-391. doi:10.1016/j.bios.2015.03.049
Peer Reviewed verified by ORBi

Ghoshdastider, U., Viga, R., & Kraft, M. (2014). Wireless time synchronization of a collaborative brain-computer-inteface using Bluetooth low energy. In Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014".
Peer reviewed

Almutairi, B., Alsheri, A., & Kraft, M. (2014). MASH2-0 Electromechanical Sigma-Delta Modulator for capacitive MEMS sensors using dual quantization method. In Proceedings of "IEEE Sensors Conference : Espagne - Novembre 2014".
Peer reviewed

Mross, S., Fürst, P., Pierrat, S., Zimmermann, T., & Kraft, M. (2014). CMOS potentiostat and sensor with multilayer membrane for wide range measurements of glucos concentrations. In Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014".
Peer reviewed

Alshehri, A., Almutairi, B., Gardonio, P., & Kraft, M. (2014). Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically isolated mass-spring-damper systems. In Proceedings of "IEEE Sensor Conference : Espagne - Novembre 2014".
Peer reviewed

Gembaczka, P., Görtz, M., & Kraft, M. (2014). Development of an implantable integrated MEMS pressure sensor using polyimide epoxy composite and Atomic Layer Deposition for encapsulation. In Proceedings of "48th DGBMT Annual Conf. : Hannover, Germany Octobre 2014".
Peer reviewed

Görtz, M., vom Bögel, G., & Kraft, M. (2014). Implantable sensor to measure liquor pressure of a ventricular drainage system. In Proceedings of "48th DGBMT Annual Conf. : Hannover, Germany Octobre 2014".
Peer reviewed

Ghoshdastider, U., Viga, R., & Kraft, M. (2014). Non-invasive synchronized spatially high-resolution wireless body area network. In Proceedings of "IEE Int. Conf. on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP) - Singapore, April 2014".
Peer reviewed

De Leon, M. T., Chong, H., & Kraft, M. (2014). Solar thermoelectric generators fabricated on a silicon-on-insulator substrate. Journal of Micromechanics and Microengineering, 24 (8), 085011 (12pp) // 085011. doi:10.1088/0960-1317/24/8/085011
Peer Reviewed verified by ORBi

Gembaczka, P., Goertz, M., Goehlich, A., Mokwa, W., & Kraft, M. (2014). Encapsulation of implantable integrated MEMS pressure sensors using Polyimide Epoxy composite and Atomic Layer Deposition. Journal of Sensors and Sensor Systems. doi:10.5194/jsss-3-335-2014
Peer Reviewed verified by ORBi

Chang, H., Zhao, H., Ye, F., Yuan, G., Xie, J., Kraft, M., & Yuan, W. (2014). A rotary comb-actuated microgripper with a large displacement range. Microsystem Technologies, 20 (1), 119-126. doi:10.1007/s00542-013-1737-8
Peer Reviewed verified by ORBi

Sterling, R. C., Rattanasonti, H., Weidt, S., Lake, K., Srinivasan, P., Webster, S. C., Kraft, M., & Hensinger, W. K. (2014). Fabrication and operation of a two-dimensional ion-trap lattice on a high-voltage microchip. Nature Communications, 5, 3637. doi:10.1038/ncomms4637
Peer Reviewed verified by ORBi

De Leon, M. T., Tarazona, A., Chong, H., & Kraft, M. (2014). Design, modeling, fabrication, and evaluation of thermoelectric generators with hot-wire chemical vapor deposited polysilicon as thermoelement material. Journal of Electronic Materials, 43 (11), 4070-4081. doi:10.1007/s11664-014-3352-6
Peer Reviewed verified by ORBi

Chen, F., Yuan, W., Chang, H., Yuan, G., Xie, J., & Kraft, M. (2014). Design and implementation of an optimized double closed-loop control system for MEMS vibratory gyroscope. IEEE Sensors Journal, 14 (1), 184-196. doi:10.1109/JSEN.2013.2271586
Peer Reviewed verified by ORBi

Chen, F., Yuan, W., Chang, H., Zeimpekis, I., & Kraft, M. (2014). Low noise vacuum-packaged MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma-delta modulators. In Proceedings of "IEEE MEMS Conf. : San Francisco- Janvier 2014" (pp. 761-764).
Peer reviewed

Rattanasonti, H., Sterling, R., Srinivasan, P., Hensinger, W., & Kraft, M. (2013). Microfabricated two-dimensional (2D) hexagonal lattice trap. In Proceedings of "IEEE Sensor Conference : Baltimore - Novembre 2013".
Peer reviewed

Gembaczka, P., Görtz, M., Kordas, N., Lerch, R., Muentjes, J., Kraft, M., & Mokwa, W. (2013). Kapazitive integrierte Drucksnesoren für ein implantierbares System zur drahtlosen Durckmessung in der Pulmonalarterie. In Proceedings of "Mikrosystemkongress : Allemagne - Octobre 2013".
Peer reviewed

Görtz, M., Betz, W., Mokwa, W., Vogt, H., & Kraft, M. (2013). Verkapselungstechniken für implantierbare integrierte MEMS Drucksensoren. In Von Bauelementen zu Systemen : Mikrosystemtechnik Kongress 2013 (pp. 586-587). VDE-Verl., Berlin [u.a.].
Peer reviewed

de Leon, M., & Kraft, M. (2013). Design and modelling of SOI-Based solar thermoelectric generators. In Proc. Eurosensors XXVI Conference.
Peer reviewed

Kibler, S., Zimmermann, T., Pierrat, S., Klein, B., Schiller, S., & Kraft, M. (2013). A new real time biomimetic membrane biosensor based on a capacitive readout ASIC for Antibiotics. In Proceedings of "Transducers 2013, M3P.085: Espagne - Juin 2013".
Peer reviewed

Kraft, M., & White, N. (Eds.). (2013). MEMS for automotive and aerospace applications. Oxford, United Kingdom: Woodhead Publ. doi:10.1533/9780857096487

Alshehri, A., Kraft, M., & Gardonio, P. (2013). Two-mass MEMS velocity sensor: internal feedback loop design. IEEE Sensors Journal, 13 (3), 1003-1011. doi:10.1109/JSEN.2012.2228849
Peer Reviewed verified by ORBi

Gleeson, R., Kraft, M., & White, N. M. (2013). Design and analysis of an SOI MEMS voltage step-up converter. Journal of Micromechanics and Microengineering, 23 (11), 114017. doi:10.1088/0960-1317/23/11/114017
Peer Reviewed verified by ORBi

Cotter, J. P., Zeimpekis, I., Kraft, M., & Hinds, E. A. (2013). Improved surface quality of anisotropically etched silicon {111} planes for mm-scale integrated optics. Journal of Micromechanics and Microengineering, 23 (11), 117006. doi:10.1088/0960-1317/23/11/117006
Peer Reviewed verified by ORBi

Ding, H., Yang, Z., Wang, Z., Kraft, M., & Yan, G. (2013). MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator. Science China Information Sciences, 56 (10), 1-10. doi:10.1007/s11432-012-4670-z
Peer Reviewed verified by ORBi

Kraft, M. (2013). System level modeling of electro-mechanical sigma delta modulators for inertial MEMS sensors. In T. Bechtold, G. Schrag, ... L. Feng (Eds.), System-level modeling of MEMS (pp. 377-404). Wiley-VCH. doi:10.1002/9783527647132.ch16
Peer reviewed

Gleeson, R., Kraft, M., & White, N. M. (2012). Design and analysis of SOI MEMS voltage step up converters. In Proceedings PowerMEMS 2012 (pp. 311-314).
Peer reviewed

Gleeson, R., Kraft, M., & White, N. (2012). Design and analysis of MEMS step up voltage converters. In IEEE Sensors 2012 (pp. 1-4). IEEE. doi:10.1109/ICSENS.2012.6411274
Peer reviewed

Wood, G. S., Pu, S. H., Zhao, C., & Kraft, M. (2012). Design of biological sensors utilising mode-localisation in electrostatically coupled microresonators. In 23rd Micromechanics and Microsystems Europe Workshop. Verl. ISLE.
Peer reviewed

Chen, F.-L., Chang, H., Yuan, W., Wilcock, R., & Kraft, M. (2012). Parameter optimization for a high-order band-pass continuous-time sigma-delta modulator MEMS gyroscope using a genetic algorithm approach. Journal of Micromechanics and Microengineering, 22 (10), 105006. doi:10.1088/0960-1317/22/10/105006
Peer Reviewed verified by ORBi

Zhao, C., Wood, G., Suan, S., & Kraft, M. (2012). Design of an ultra-sensitive MEMS force sensor utlizing mode localisation in weakly coupled resonators. In Proceedings of "Micromechanics and Microsystems Europe Workshop: Allemagne - 2012".
Peer reviewed

Sari, I., Zeimpekis, I., & Kraft, M. (2012). A dicing free SOI process for MEMS devices. Microelectronic Engineering, 95, 121-129. doi:10.1016/j.mee.2012.02.004
Peer Reviewed verified by ORBi

Chang, H., Xue, L., Jiang, C., Kraft, M., & Yuan, W. (2012). Combining numerous uncorrelated MEMS gyroscopes for accuracy improvement based on an optimal Kalman filter. IEEE Transactions on Instrumentation and Measurement, 61 (11), 3084-3093. doi:10.1109/TIM.2012.2200818
Peer Reviewed verified by ORBi

Almutairi, B., & Kraft, M. (2012). Multi stage noise shaping sigma--delta modulator (MASH) for capacitive MEMS accelerometers. Sensors and Actuators. A, Physical, 186 (Oct.), 169-177. doi:10.1016/j.sna.2012.05.010
Peer Reviewed verified by ORBi

Chang, H., Zhang, F., Ding, J., Chen, F.-L., Hong, S., Kraft, M., & Yuan, W. (2012). A highly reliable integrated PDMS interconnector with a long cast flange for microfluidic systems. Microsystem Technologies, 18 (6), 723-730. doi:10.1007/s00542-012-1507-z
Peer Reviewed verified by ORBi

Zeimpekis, I., Sari, I., & Kraft, M. (2012). Characterization of a mechanical motion amplifier applied to a MEMS accelerometer. Journal of Microelectromechanical Systems, 21 (5), 1032-1042. doi:10.1109/JMEMS.2012.2196491
Peer Reviewed verified by ORBi

Laliotis, A., Trupke, M., Cotter, J. P., Lewis, G. N., Kraft, M., & Hinds, E. A. (2012). ICP polishing of silicon for high-quality optical resonators on a chip. Journal of Micromechanics and Microengineering, 22 (12), 125010. doi:10.1088/0960-1317/22/12/125011
Peer Reviewed verified by ORBi

Almutairi, B., & Kraft, M. (2011). Experimental study of single loop sigma-delta and multi stage noise shaping (MASH) modulators for MEMS acceleremoter. In Proceedings of "IEEE Sensor Conference, Limerick - Novembre 2011" (pp. 520-523).
Peer reviewed

Alshehri, A., Gardonio, P., Elliott, S., Zilletti, M., & Kraft, M. (2011). Experimental evaluation of a two degree of freedom capacitive MEMS sensor for velocity measurments. In Proceedings of "Eurosensors XXV Conference, Athens, Septembre 2011".
Peer reviewed

Zeimpekis, A., Sari, I., & Kraft, M. (2011). Deflection amplification mechanism in a capacitive accelerometer. In Proceedings of "Transducers 2011 Conference - Juin 2011" (pp. 1096-1100).
Peer reviewed

Salimi, P., & Kraft, M. (2011). Quadrature error cancellation in high order Modulator closed loop interfaces for micro-gyroscopes. In Proceedings of "MME 2011 Conference, Tonsberg Septembre 2011".
Peer reviewed

Sari, I., & Kraft, M. (2011). A micro electrostatic linear accelerator based on electromganetic levitation. In Proceedings of "Transducers 2011 Conference - Juin 2011" (pp. 1729-1733).
Peer reviewed

Borghesi, M., Kar, S., Prasad, R., Kakolee, F. K., Quinn, K., Ahmed, H., Sarri, G., Ramakrishna, B., Qiao, B., Geissler, M., Ter-Avetisyan, S., Zepf, M., Schettino, G., Stevens, B., Tolley, M., Ward, A., Green, J., Forster, P. S. S., Gallegos, P., ... Green, S. (2011). Ion source development and radiobiology applications within the LIBRA project. In Laser Acceleration of Electrons, Protons, and Ions; and Medical Applications of Laser-Generated Secondary Sources of Radiation and Particles (pp. 80791E-1-80791E-6). Bellingham and Wash., United States - Washington: SPIE. doi:10.1117/12.888262
Peer reviewed

Gleeson, R., White, N. M., & Kraft, M. (2011). Design and analysis of two types of MEMS DC-DC step up voltage converters. In MME 2011: Proceedings (pp. 46-49).
Peer reviewed

Wilcock, R., & Kraft, M. (2011). Genetic algorithm for the design of electro-mechanical sigma delta modulator MEMS sensors. Sensors, 11 (10), 9217-9238. doi:10.3390/S111009217
Peer Reviewed verified by ORBi

Almutairi, B., & Kraft, M. (2011). Multi stage noise shaping Sigma-Delta Modulator (MASH) for capacitive MEMS accelerometers. In 2011 Eurosensors XXV. Curran. doi:10.1016/j.proeng.2011.12.324
Peer reviewed

Ding, H., Yang, Z., Yan, G., Wilcock, R., & Kraft, M. (2010). MEMS gyroscope control system using a band-pass continuous-time Sigma-Delta Modualtor. In Proceedings of "IEEE Sensor Conference : Hawai- Novembre 2010".
Peer reviewed

Kraft, M., & Damrongsak, B. (2010). Micromachined gyroscopes based on a rotating mechanically unconstrained proof mass. In IEEE Sensors 2010. Piscataway and NJ, United States - New Jersey: IEEE. doi:10.1109/ICSENS.2010.5690984
Peer reviewed

Kiang, K., & Kraft, M. (2010). A novel low cost spring-less RF MEMS Switch prototype. In Proc. Eurosensors XXIV Conference.
Peer reviewed

Sari, I., Zeimpekis, I., & Kraft, M. (2010). A full wafer dicing free dry release process for MEMS devices. In Eurosensors XXIV Conference. Amsterdam, Netherlands: Elsevier. doi:10.1016/j.proeng.2010.09.242
Peer reviewed

Rattanasonti, H., Sterling, R., Srinivasan, P., Hensinger, W., & Kraft, M. (2010). Wet etching optimization for arbitrarly shaped planar electrode structures. In Proceedings of "MME 2010 Conference, The Netherlands".
Peer reviewed

Alshehri, A., Kraft, M., & Gardonio, P. (2010). Two-degree-of-freedom capacitive MEMS velocity sensor. In Proceedings of "MME 2010 Conference, The Netherlands".
Peer reviewed

De Leon, M. T., Taatizadeh, P., & Kraft, M. (2010). Improving the efficiency of thermoelectric generators by using solar heat concentrators. In MME 2010 Abstracts: Proceedings.
Peer reviewed

Qiao, X., Gao, N., Moktadir, Z., Kraft, M., & Starvink, M. J. (2010). Fabrication of MEMS components using ultra fine grained aluminium. Journal of Micromechanics and Microengineering, 20 (4). doi:10.1088/0960-1317/20/4/045029

Qiao, X. G., Gao, N., Moktadir, Z., Kraft, M., & Starnik, M. J. (2010). Microembossing of ultrafine grained Al: Microstructural analysis and finite element modeling. Journal of Micromechanics and Microengineering, 20 (4), 045029. doi:10.1088/0960-1317/20/10/105002
Peer Reviewed verified by ORBi

Almutairi, B., & Kraft, M. (2010). Comparative study of multi stage noise shaping and single loop sigma-delta modulators for MEMS Accelerometers. In Poc. Eurosensors XXIV.
Peer reviewed

Luo, J., Rapisarda, P., & Kraft, M. (2010). Dynamics-level design of a band-pass Sigma-Delta-Modulator for a micro-machined gyroscope. In Proc. Int. Symp.on Mathematical Theory of Networks and Systems.
Peer reviewed

Ding, H., Liu, X., Lin, L., Chi, X., Cui, J., Kraft, M., Yang, Z., & Yan, G. (2010). A high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure. IEEE Sensors Journal, 10 (6), 1066-1074. doi:10.1109/JSEN.2010.2043669
Peer Reviewed verified by ORBi

Sewell, R. J., Dingjan, J., Baumgärtner, F., Llorente-Garcia, I., Eriksson, S., Hinds, E. A., Lewis, G. N., Srinivasan, P., Moktadir, Z., Gollasch, C. O., & Kraft, M. (2010). Atom chip for BEC interferometry. Journal of Physics : B Atomic Molecular and Optical Physics, 43 (5), 051003. doi:10.1088/0953-4075/43/5/051003
Peer Reviewed verified by ORBi

Srinivasan, P., Gollasch, C. O., & Kraft, M. (2010). Three dimensional electrostatic actuators for tunable optical micro cavities. Sensors and Actuators. A, Physical, 161 (1-2), 191-198. doi:10.1016/j.sna.2010.05.012
Peer Reviewed verified by ORBi

Sari, I., Cardwell, C., & Kraft, M. (2009). A study of levitation forces in MEMS devices. In MME 2009.
Peer reviewed

Kraft, M., & Ding, H. (2009). Sigma-delta modulator based control systems for MEMS gyroscopes. In 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 41-46). Piscataway and NJ, United States - New Jersey: IEEE. doi:10.1109/NEMS.2009.5068523
Peer reviewed

Iqtidar Shakoor, R., Bazaz, S. A., Kraft, M., Lai, Y., & Masood Ul Hassan, M. (2009). Thermal actuation based 3-DoF non-resonant microgyroscope using MetalMUMPs. Sensors, 9 (4), 2389-2414. doi:10.3390/s90402389
Peer Reviewed verified by ORBi

Lewis, G. N., Moktadir, Z., Gollasch, C. O., Kraft, M., Pollock, S., Ramirez-Martinez, F., Ashmore, J. P., Laliotis, A., Trupke, M., & Hinds, E. A. (2009). Fabrication of magnetooptical atom traps on a chip. Journal of Microelectromechanical Systems, 18 (2), 347-353. doi:10.1109/JMEMS.2008.2007200
Peer Reviewed verified by ORBi

Luo, J., Ding, H., & Kraft, M. (2009). A new design methodology for electro-mechanical Sigma- Delta-Modulators. In 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 881-884). Piscataway and NJ, United States - New Jersey: IEEE. doi:10.1109/NEMS.2009.5068715
Peer reviewed

Srinivasan, P., Gollasch, C., & Kraft, M. (2009). Performance of an electrostatic actuator for tunable optical microcavities. In Proc. MME 2009 Conference.
Peer reviewed

Gong, W., Mowlem, M., Kraft, M., & Morgan, F. (2009). A simple, low-cost double beam spectrophotometer for colorimetric detection of nitrite in seawater. IEEE Sensors Journal, 9 (7), 862-869. doi:10.1109/JSEN.2009.2020659
Peer Reviewed verified by ORBi

Kraft, M. (2009). Engineering atom chips. In 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Piscataway and NJ, United States - New Jersey: IEEE. doi:10.1109/NEMS.2009.5068794
Peer reviewed

Lewis, G. N., Moktadir, Z., Kraft, M., & Jiang, L. (2009). Resistivity percolation of co-sputtered amorphous Si/Ti films. Materials Letters, 63 (2), 215-217. doi:10.1016/j.matlet.2008.09.061
Peer Reviewed verified by ORBi

Srinivasan, P., Gollasch, C., & Kraft, M. (2009). Design, fabrication and testing of tunable microcavities for atom chips. In Proc. Eurosensors XXIII Conference (pp. 159).
Peer reviewed

Zeimpekis, I., & Kraft, M. (2009). Single stage deflection amplification in a SOG capacitive acceleromoter. In Proc. Eurosensors XXIII Conference (pp. 286).
Peer reviewed

Zeimpekis, I., & Kraft, M. (2008). Displacement amplification mechanism in a capacitive accelerometer. In MME 2008: Technical digest.
Peer reviewed

Kiang, K. S., & Kraft, M. (2008). Development of a low actuation voltage RF MEMS switch. In Eurosensors XXII. Düsseldorf, Germany: VDI.
Peer reviewed

Gong, W., Mowlem, M., Kraft, M., & Morgan, F. (2008). Oceanographic sensor for in-situ temperature and conductivity monitoring. In OCEANS 2008 - MTS/IEEE Kobe Techno-Ocean. Piscataway and N. J., United States - New Jersey: IEEE. doi:10.1109/OCEANSKOBE.2008.4530906
Peer reviewed

Breit, S., Welham, C., Rouvillois, S., Kraft, M., & McNie, M. (2008). Simulation environment for accurate noise and robustness analysis of MEMS under mixed-signal control. In Proc. ASME Int. Mech. Eng. Congress.
Peer reviewed

Damrongsak, B., Gardonio, P., & Kraft, M. (2008). MEMS Velocity sensor using direct velocity feedback. In Proc. Eurosensors XXII Conference (pp. 218-221).
Peer reviewed

Damrongsak, B., Kraft, M., Rajgopal, S., & Mehregany, M. (2008). Design and fabrication of a micromachined electrostatically suspended gyroscope. Proceedings of the Institution of Mechanical Engineers. Part C, Journal of Mechanical Engineering Science, 222 (1), 53-63. doi:10.1243/09544062JMES665
Peer Reviewed verified by ORBi

Taberham, A., Kraft, M., Mowlem, M., & Morgan, H. (2008). The fabrication of lab-on-chip devices from fluoropolymers. Journal of Micromechanics and Microengineering, 18 (6), 064011. doi:10.1088/0960-1317/18/6/064011
Peer Reviewed verified by ORBi

Moktadir, Z., & Kraft, M. (2008). Scaling properties of pyrex and silicon surfaces blasted with sharp particles. Physica A. Statistical Mechanics and its Applications, 387 (8-9), 2083-2090. doi:10.1016/j.physa.2007.11.026
Peer Reviewed verified by ORBi

Dong, Y., Kraft, M., Hedenstierna, N., & Redman-White, W. (2008). Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator. Sensors and Actuators. A, Physical, 145-146 (Jul.-Aug.), 299-305. doi:10.1016/j.sna.2007.10.057
Peer Reviewed verified by ORBi

Taberham, A., Kraft, M., Mowlem, M., & Morgan, H. (September 2007). Fabrication of lab-on-chip devices from fluoropolymers [Paper presentation]. Proc.MME2007 Conference, Portugal.

Damrongsak, B., & Kraft, M. (2007). Performance analysis of a micromachined electrostatically suspended gyroscope employing sigma-delta force feedback. In MME 2007: 18th Workshop on MicroMechanics Europe (pp. 269-272). Universidade do Minho.
Peer reviewed

Taberham, A., Kraft, M., Mowlem, M., & Morgan, H. (2007). Fabrication of lab-on-chip devices from fluoropolymers. In Proceedings of "MME 2007 Conference : Portugal - Septembre 2007" (pp. 111-114).
Peer reviewed

Jiang, L., Pandraud, G., French, P. J., Spearing, S. M., & Kraft, M. (2007). Wafer Bonding with nanoprecision alignment for micro/nano systems. In TRANSDUCERS 2007 (pp. 2103-2016). doi:10.1109/SENSOR.2007.4300580
Peer reviewed

Dong, Y., Kraft, M., Hedenstierna, N., & Redman-White, W. (2007). Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator. In TRANSDUCERS 2007 (pp. 2533-2536). doi:10.1109/SENSOR.2007.4300687
Peer reviewed

Kraft, M., & Dong, Y. (2007). High-order sigma-delta interfaces for capacitive MEMS sensors. In Proceedings Sensor Conference 2007 (pp. 301-306). AMA Service GmbH.
Peer reviewed

Gollasch, C., Moktadir, Z., Lewis, G., Kraft, M., Trupke, M., Eriksson, S., & Hinds, E. (2007). Integration of a tuneable optical micro-cavity for single atom detection on an atom chip. In Proc. QELS 2007.
Peer reviewed

Jiang, L., Pandraud, G., French, P. J., Spearing, S. M., & Kraft, M. (2007). A novel method for nanoprecision alignment in wafer bonding applications. Journal of Micromechanics and Microengineering, 17 (7), 61-S67. doi:10.1088/0960-1317/17/7/S01
Peer Reviewed verified by ORBi

Sun, D.-M., Dong, W., Liu, C.-X., Chen, W.-Y. Y., & Kraft, M. (2007). Analysis of the dynamic behaviour of a torsional micro-mirror. Microsystem Technologies, 13 (1), 61-70. doi:10.1007/s00542-006-0257-1
Peer Reviewed verified by ORBi

Moktadir, Z., Darquié, B., Kraft, M., & Hinds, E. A. (2007). The effect of self-affine fractal roughness of wires on atom chips. Journal of Modern Optics, 54 (13-15), 2149-2160. doi:10.1080/09500340701427151
Peer Reviewed verified by ORBi

Lewis, G., Moktadir, Z., Gollasch, C., Trupke, M., Ramirez-Martinez, F., Ashmore, J., Hinds, E., & Kraft, M. (2007). Fabrication of patterned pyramidal micromirros and current carrying wires for atom chips. In Proc.MME 2007 Conference (pp. 183-186).
Peer reviewed

Dong, Y., Kraft, M., & Redman-White, W. (2007). Micromachined vibratory gyroscopes controlled by a high-order bandpass sigma-delta modulator. IEEE Sensors Journal, 7 (1), 59-69. doi:10.1109/JSEN.2006.888604
Peer Reviewed verified by ORBi

Dong, Y., Kraft, M., & Redman-White, W. (2007). Higher order noise-shaping filters for high-performance micromachined accelerometers. IEEE Transactions on Instrumentation and Measurement, 56 (5), 1666-1674. doi:10.1109/TIM.2007.904477
Peer Reviewed verified by ORBi

Dong, Y., Kraft, M., & Redman-White, W. (2006). Relaxation fabrication tolerance of micromachined inertial sensors using high order electromechanical sigma-delta modulators. In The 17th Micromechanics Europe Workshop, MME'06 (pp. 33-36).
Peer reviewed

Haas, C., & Kraft, M. (2006). Low-cost fabrication of valveless micropumps. In Proceedings of "MME 2006 Conference, UK Septembre 2006" (pp. 65-68).
Peer reviewed

Haas, C., & Kraft, M. (2006). Low-cost fabrication of valveless micropumps. In Proceedings of "MME 2006 Conference, UK Septembre 2006".
Peer reviewed

Kiang, K. S., & Kraft, M. (2006). Development of a low voltage MEMS switch for RF applications. In Proc. MME 2006 Conference (pp. 105-108).
Peer reviewed

Jiang, L., Pandraud, G., French, P. J., Spearing, S. M., & Kraft, M. (2006). Nanoprecision alignment for wafer bonding. In The 17th Micromechanics Europe Workshop, MME'06 (pp. 101-104).
Peer reviewed

Damrongsak, B., & Kraft, M. (2006). Design and simulation of a micromachined electrostatically suspended gyroscope. In The IET Seminar on MEMS Sensors and Actuators (pp. 267-272).
Peer reviewed

Gollasch, C. O., Moktadir, Z., Lewis, G., Kraft, M., Trupke, M., Eriksson, S., & Hinds, E. A. (2006). MEMS actuators for aligning and tuning optical micro cavities on atom chips. In The IET Seminar on MEMS Sensors and Actuators (pp. 275-280).
Peer reviewed

Mowlem, M., Chavagnac, V., Statham, P., Burkhill, P., Benazzi, G., Holmes, H., Morgan, H., Haas, C., Kraft, M., & Taberham, A. (2006). Microsystem technology for marine measurment. In Proc. MTS/IEEE Oceans Conference (pp. 845-850).
Peer reviewed

Kraft, M. (2006). Case study: Control systems for capacitive inertial sensors. In E. Gaura & R. Newman, Smart MEMS and Sensor Systems. Imperial College Press.
Peer reviewed

Dong, Y., Kraft, M., & Redman-White, W. (2006). Force feedback linearization for higher-order electromechanical sigma--delta modulators. Journal of Micromechanics and Microengineering, 16 (6), 54-S60. doi:10.1088/0960-1317/16/6/S09
Peer Reviewed verified by ORBi

Kiang, K. S., Houlihan, R., Gindila, M., Damrongsak, B., & Kraft, M. (2006). Design and simulation of a springless micro switch. Electronics World, 112 (1844), 30-34.
Peer reviewed

Trupke, M., Ramirez-Martinez, F., Curtis, E. A., Ashmore, J. P., Eriksson, S., Hinds, E. A., Moktadir, Z., Gollasch, C. O., Kraft, M., Vijaya Prakash, G., & Baumberg, J. J. (2006). Pyramidal micromirrors for microsystems and atom chips. Applied Physics Letters, 88 (7), 071116-071116-3. doi:10.1063/1.2172412
Peer Reviewed verified by ORBi

Damrongsak, B., & Kraft, M. (2005). A micromachined electrostatically suspended gyroscope with digital for feedback. In Proceedings of "IEEE Sensor Conference : USA - Octobre 2005" (pp. 401-404).
Peer reviewed

Dong, Y., Kraft, M., & Redman-White, W. (2005). Force feedback linearization for higher-order electromechanical sigma--delta modulators. In 16th European Workshop on Micromechanics. [MME 2005] (pp. 215-218).
Peer reviewed

Lewis, G., Moktadir, Z., Gollasch, C. O., Kraft, M., Trupke, M., Eriksson, S. J., & Hinds, E. A. (2005). Fabrication of gold wires for atom chips by electrochemical deposition: a comparative study. In 16th European Workshop on Micromechanics. [MME 2005] (pp. 56-59).
Peer reviewed

Damrongsak, B., & Kraft, M. (2005). Electrostatic suspension control for micromachined inertial sensors employing a levitated-disk proof mass. In 16th European Workshop on Micromechanics. [MME 2005] (pp. 240-243).
Peer reviewed

Gollasch, C. O., Moktadir, Z., Lewis, G. N., Kraft, M., Trupke, M., & Eriksson, S. (2005). A one-dimensional electrostatic actuator for tuning optical cavities on atom chips. In 16th European Workshop on Micromechanics. [MME 2005] (pp. 219-222).
Peer reviewed

Dong, Y., Kraft, M., & Redman-White, W. (2005). Noise analysis for high order electromechanical sigma-delta modulators. In The 5th IEE International Conference on Advanced A-D and D-A Conversion Techniques and Their Applications (pp. 147-152).
Peer reviewed

Kraft, M., & Dong, Y. (2005). Higher order sigma-delta modulators interfaces for capapcitive sensors. In 2005 NSTI Nanotechnology Conference and Trade Show : NSTI Nanotech 2005 (pp. 459-462).
Peer reviewed

Gollasch, C. O., Moktadir, Z., Kraft, M., Trupke, M., Eriksson, S., & Hinds, E. A. (2005). A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips. Journal of Micromechanics and Microengineering, 15 (7), 39-S46. doi:10.1088/0960-1317/15/7/006
Peer Reviewed verified by ORBi

Koukharenka, A., Kraft, M., Ensell, G., & Hollinshead, N. (2005). A comparative study of four thick photoresists for MEMS applications. Journal Material Science: Materials in Electronics, 16 (11-12).
Peer reviewed

Trupke, M., Hinds, E. A., Eriksson, S., Curtis, E. A., Moktadir, Z., Kukharenka, E., & Kraft, M. (2005). Microfabricated high-finesse optical cavity with open access and small volume. Applied Physics Letters, 87 (21), 211106-211106-3. doi:10.1063/1.2132066
Peer Reviewed verified by ORBi

Houlihan, R., & Kraft, M. (2005). Modelling squeeze film effects in a MEMS accelerometer with a levitated proof mass. Journal of Micromechanics and Microengineering, 15 (5), 893-902. doi:10.1088/0960-1317/15/5/001
Peer Reviewed verified by ORBi

Dong, Y., Kraft, M., Gollasch, C. O., & Redman-White, W. (2005). A high-performance accelerometer with a fifth-order sigma--delta modulator. Journal of Micromechanics and Microengineering, 15 (7), 22-S29. doi:10.1088/0960-1317/15/7/004
Peer Reviewed verified by ORBi

Moktadir, Z., Wensink, H., & Kraft, M. (2005). Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36 (3-6). doi:10.1016/j.mejo.2005.02.082
Peer Reviewed verified by ORBi

Sun, D.-M., Dong, W., Guo, W., Liu, C.-X., Wang, G. D., Yan, X., Xu, B., Chen, W.-Y. Y., & Kraft, M. (2005). Study on actuating voltage and switching time of a MOEMS optical switch. Optics and Laser Technology, 37 (8), 601-607. doi:10.1016/j.optlastec.2004.09.005

Rouabah, H., Gollasch, C., & Kraft, M. (2005). Design optimization of an electrostatic MEMS actuator with low spring constant for an "Atom Chip". In Proc. NSTI Nanotech (pp. 3, pp489-492).
Peer reviewed

Malleo, D., Haas, C., & Kraft, M. (2005). Design, modelling and simulation of a PZN-PT actuated micropump. In Design, modelling and simulation of a PZN-PT actuated micropump (pp. 1,pp700-703).
Peer reviewed

Kraft, M. (2005). Higher order sigma-delta modulators interfaces for capacitive sensors (Invited). In The IEE Seminar and Exhibition on MEMS Sensor Technologies (pp. 5/1-5/21).
Peer reviewed

Kraft, M., Dong, Y., & Redman-White, W. (2005). High order bandpass sigma delta interfaces for vibratory gyroscopes. In Proc. IEE Sensors (pp. 1080-1084).
Peer reviewed

Eriksson, S., Trupke, M., Powell, H. F., Sahagun, D., Sinclair, D. J., Curtis, E. A., Sauer, B. E., Hinds, E. A., Moktadir, Z., Gollasch, C. O., & Kraft, M. (2005). Integrated optical components on atom chips. European Physical Journal D -- Atoms, Molecules, Clusters and Optical Physics, 35 (1), 135-139. doi:10.1140/epjd/e2005-00092-x
Peer Reviewed verified by ORBi

Moktadir, Z., & Kraft, M. (2005). Wavelet characterization of coarsening during unstable MBE growth. Microelectronics Journal, 56 (3-6). doi:10.1016/j.mejo.2005.02.109
Peer Reviewed verified by ORBi

Moktadir, Z., & Kraft, M. (2004). Wavelets Characterization of coarsing during unstable MBE growth. In Proceedings of "Low Dimensional Semiconductor Devices Conference, Cancun, décembre 2004".
Peer reviewed

Gollasch, C., Moktadir, Z., Kraft, M., Bagnall, D., Trupke M, Eriksson, S., & Hinds, E. (2004). A three-dimensional electrostatic actuator with a locking mechanism for a new generation of atom chips. In Proceedings of "MME 2004 Conference, Belgique - Septembre 2004" (pp. 33-36).
Peer reviewed

Gindila, M. V., Kraft, M., Houlihan, R., & Redman-White, W. (2004). Solid-state electronic interface for a levitated disc accelerometer. In Eurosensors XVIII, 18th European Conference on Solid-State Sensors.
Peer reviewed

Kiang, K. S., Houlihan, R., Gindila, M., Damrongsak, B., & Kraft, M. (2004). Design and simulation of a spring-less micro switch. In 15th European Workshop on Micromechanics, MME 2004 (pp. 57-61).
Peer reviewed

Dong, Y., Kraft, M., & Gollasch, C. O. (2004). A high-performance accelerometer with a fifth-order sigma--delta modulator. In 15th European Workshop on Micromechanics, MME 2004 (pp. 41-44).
Peer reviewed

Gollasch, C. O., Moktadir, Z., Koukharenko, E., Kraft, M., Bagnall, D. M., Eriksson, S. J., Trupke, M., & Hinds, E. A. (2004). Integration of a two-dimensional electrostatic actuator in a new generation of atom chips. In Eurosensors XVIII, 18th European Conference on Solid-State Sensors.
Peer reviewed

Houlihan, R., & Kraft, M. (2004). Fringe capacitance models for MEMS devices. In 15th European Workshop on Micromechanics, MME 2004 (pp. 71-74).
Peer reviewed

Kraft, M., Dong, Y., & Redman-White, W. (2004). Using higher order sigma delta modulators as interface for closed loop micromachined sensors. In The 5th IEE International Conference on Advanced A-D and D-A Conversion Techniques and Their Applications (pp. 293-298).
Peer reviewed

Kraft, M., Dong, Y., & Redman-White, W. (2004). Using higher-order sigma-delta modulators as interface for closed loop micromachined sensors. In Proc. 5th Conf. on Advanced A/D and D/A Conversion techniques and their applications (ADDA) (pp. 293-298).
Peer reviewed

DONG, Y, & Kraft, M. (2004). Design and Simulation of a micromachined inertial sensors with higher-order single loop sigma-delta modulators. In Proc. 6th Conf. on Modeling and Simulation of Microsystems.
Peer reviewed

Haas, C. H., & Kraft, M. (2004). Modelling and analysis of a MEMS approach to dc voltage step-up conversion. Journal of Micromechanics and Microengineering, 14 (9), 114-S122. doi:10.1088/0960-1317/14/9/020
Peer Reviewed verified by ORBi

Koukharenko, E., Moktadir, Z., Kraft, M., Abdelsalam, M. E., Bagnall, D. M., Vale, C., Jones, M. P. A., & Hinds, E. A. (2004). Microfabrication of gold wires for atom guides. Sensors and Actuators, 115 (2-3), 600-607. doi:10.1016/j.sna.2004.03.069
Peer reviewed

Moktadir, Z., Koukharenka, E., Kraft, M., Bagnall, D. M., Powell, H. F., Jones, M., & Hinds, E. A. (2004). Etching techniques for realizing optical micro-cavity atom traps on silicon. Journal of Micromechanics and Microengineering, 14 (9), 82-S85. doi:10.1088/0960-1317/14/9/014
Peer Reviewed verified by ORBi

Moktadir, Z., Prakash, G. V., Koukharenko, E., Gollasch, C. O., Bagnall, D. M., Kraft, M., Hinds, E. A., & Baumberg, J. J. (2004). Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH. In Conference on Lasers and Electro-Optics (CLEO).
Peer reviewed

Beeby, S., Ensell, G., Kraft, M., & White, N. (2004). MEMS Physical Sensors. Artech House.

Stefanou, S., Hamel, J. S., Baine, P., Bain, M., Armstrong, B. M., Gamble, H. S., Kraft, M., & Kemhadjian, H. A. (2004). Ultralow silicon substrate noise crosstalk using metal Faraday cages in an SOI technology. IEEE Transactions on Electron Devices, 51 (3), 486-491. doi:10.1109/TED.2003.822348
Peer Reviewed verified by ORBi

Kham, MN, Houlihan, R, & Kraft, M. (2004). Design and simulation of a Mechanical Amplifier for Inertial Sensing Applications. In Proc. 6th Conf. on Modeling and Simulation of Microsystems (pp. 1,pp343-346).
Peer reviewed

Haas, CH, & Kraft, M. (2003). Modelling and analysis of a MEMS approach to DC Voltage step-up conversion. In Proc. Micromechanics Europe (MME) (pp. 235-238).
Peer reviewed

Houlihan, R, Chee, KL, & Kraft, M. (2003). Analytical and finite element modelling of a capacitive acceleromter. In Proc. Eurosensors XVII Conference.
Peer reviewed

Houlihan, R., Kukharenka, A, Sehr, H., & Kraft, M. (2003). Optimisation, design and fabrication of a novel accelerometr. In IEE International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'03) (pp. 1402-1406).
Peer reviewed

Baine, P., Gamble, H.S., Armstrong, B.M., Bain, M., McNeill, D.W., Stefanou, & Kraft, M. (2003). Manufacturing processes for WSi2-GPSOI substrates and their influence on cross-talk suppression and inductance. In 7th Int. Symp. on Semi-conductor Wafer Bonding (pp. 57-63).
Peer reviewed

Koukharenko, E., Moktadir, Z., Bagnall, D., Kraft, M., Vale, C., Jones, M., & Hinds, E. (2003). Microfabrication of gold wires for atom guides. In Eurosensors XVII, 17th European Conference on Solid-State Transducers (pp. 414-415).
Peer reviewed

Mokthari, ME, & Kraft, M. (2003). Advanced control systems for MEMS capacitive sensing accelerometers. In Advanced control systems for MEMS capacitive sensing accelerometers (pp. 232-234).
Peer reviewed

Kukharenka, E., Farooqui, M. M., Grigore, L., Kraft, M., & Hollinshead, N. (2003). Electroplating moulds using dry film thick negative photoresist. Journal of Micromechanics and Microengineering, 13 (4), 67-S74. doi:10.1088/0960-1317/13/4/311
Peer Reviewed verified by ORBi

Gindila, M. V., & Kraft, M. (2003). Electronic interface design for an electrically floating micro-disc. Journal of Micromechanics and Microengineering, 13 (4), 11-S16. doi:10.1088/0960-1317/13/4/302
Peer Reviewed verified by ORBi

Kukharenka, E., & Kraft, M. (2003). Realization of electroplating molds with thick positive SPR 220-7 photoresist. Journal of Materials Science: Materials in Electronics, 14 (5-7), 319-322. doi:10.1023/A:1023923911921
Peer Reviewed verified by ORBi

Moktadir, Z, Kukharenka, A, Kraft, M., Bagnall, DM, Jones, M, Powell, H., & Hinds, E. (2003). Etching techniques for the realization of optical micro-cavities on silicon for atoms traps. In Proc. Micromechanics Europe (MME) (pp. 139-142).
Peer reviewed

Stefanou, S, Hamel, J.S., Baine, P., Baine, M., Armstrong, B.M., Gamble, H.S., Kraft, M., Kemhadjian, H.A., & Osman, K. (2002). Cross-talk suppression faraday cage structure in silicon-on-insulator. In SOI Conference, IEEE International 2002 (pp. 181-182).
Peer reviewed

Mokhtari, M., Kraft, M., Alavi, F.N., & King, D. (2002). Analysis of parasitic effects in the performance of closed loop micromachined inertial sensors with higher order SD-Modulators. In Proc. Micromechanics Europe (MME) (pp. 173-176).
Peer reviewed

Kukharenka, A., Kraft, M., Farooqui, M., Grigore, L., & Hollinshead, N. (2002). Electroplating moulds using dry film thick negative photoresist. In Proc. Micromechanics Europe (MME) (pp. 95-98).
Peer reviewed

Gindila, M.V., & Kraft, M. (2002). Electronics interface design for a micromachined levitated disk. In Proc. Micromechanics Europe (MME) (pp. 185-188).
Peer reviewed

Alavi, F., Kraft, M., Mokhtari, M., & King, DO. (2002). Parameter sensitivities of a high precision accelerometer. In Proc. Eurosensors XVI Conference (pp. 731-732).
Peer reviewed

Gindila, M.V., & Kraft, M. (2002). Design of an electronic interface for levitated disk accelerometer. In Proc. of the Symposium on Electronics and Telecommunications Etc (pp. 192-197).
Peer reviewed

Kukharenka, A., & Kraft, M. (2002). Electroplating moulds using dry film thick negative photoresist for MEMS applications. In Proc. Eurosensors XVI Conference (pp. 103-104).
Peer reviewed

Gaura, E., & Kraft, M. (2002). Neural Network techniques for sensor self-diagnosis and monitoring. In Proc. 4th Asian Control Conference (ASCC 2002) (pp. 1843-1847).
Peer reviewed

Gaura, E., & Kraft, M. (2002). Are neural network techniques the solution to measurement validation, monitoring and automatic diagnosis of sensor faults ? In Proc. of the 41st SICE Annual Conference (SICE 2002) (pp. 3, pp. 2052-2057).
Peer reviewed

Jiang, X., Wang, F., Kraft, M., & Boser, B. E. (2002). An integrated Surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. In Tech. Digest of Solid State Sensor and Actuator Workshop (pp. 202-205).
Peer reviewed

Kukharenka, A., & Kraft, M. (2002). Realisation of electroplating moulds with different thick photoresists for MEMS applications. In Proc. 4th International Conference on Material for Microelectronics and Nanoengineering (pp. 165-168).
Peer reviewed

Gaura,E, & Kraft, M. (2002). Noise considerations for closed loop digital accelerometers. In Proc. 5rd Conf. on Modelling and Simulation of Microsystems (pp. 154-157).
Peer reviewed

Houlihan, R., & Kraft, M. (2002). Modelling of an accelerometer based on a levitated proof mass. Journal of Micromechanics and Microengineering, 12 (4), 495-503. doi:10.1088/0960-1317/12/4/325
Peer Reviewed verified by ORBi

Gaura; E., & Kraft, M. (2001). Comparison of two novel control strategies for a closed loop micromachined tunnelling accelerometer. In Proc. 4rd Conf. on Modeling and Simulation of Microsystems (pp. 100-103).
Peer reviewed

Kraft, M., Redman-White, W, & Mokhtari, ME. (2001). Closed loop micromachined sensors with higher order SD-Modulators. In Proc. 4rd Conf. on Modeling and Simulation of Microsystems (pp. 104-107).
Peer reviewed

Houlihan, R, & Kraft, M. (2001). Modelling of an accelerometer based on a levitated proof mass. In Proc. Conf. on Micromechanics Europe (pp. 313-316).
Peer reviewed

Niblock, T., Kraft, M., & Sehr, H. (2001). Design criteria for a hybrid nano/photolithography system. In Proc. Conf. on Micromechanics Europe (pp. 305-308).
Peer reviewed

Kraft, M., & Gaura, E. (2001). Intelligent control for a micromachinated tunneling accelerometer. In Proceedings of ":Int. MEMS Workshop (IMEMS, Singapore 2001" (pp. 738-742).
Peer reviewed

Kraft, M., Farooqui, M. M., & Evans, A. G. R. (2001). Modelling and design of an electrostatically levitated disc for inertial sensing applications. Journal of Micromechanics and Microengineering, 11 (4), 423-427. doi:10.1088/0960-1317/11/4/324
Peer Reviewed verified by ORBi

Houlihan, R., Kukharenka, A., Gindila, M., & Kraft, M. (2001). Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk. In Proc. SPIE Conf. on Reliability, Testing and Characterization of MEMS/MOEMS (pp. 277-286).
Peer reviewed

Sehr, H., Evans, AGR, Brunnschweiler, A, & Kraft, M. (2000). Theoretical Analyses on a Novel Actuator Based on Thermally Actuated Vertical Bimorphs. In Proc. Eurosensors XIV (pp. 173-174).
Peer reviewed

Seeger JI, Jiang, X, Kraft, M., & Boser, BE. (2000). Senser finger dynamics in a Epsilon Alpha force feedback gyroscope. In Tech. Digest of Solid State Sensor and Actuator Workshop (pp. 296-299).
Peer reviewed

Sehr, H., Evans, A. G. R., Brunnschweiler, A., Ensell, G. J., & Kraft, M. (2000). A 3-dimensional actuator based on a novel combination of thermally actuated planar and vertical bimorphs. In Actuator 2000 (pp. 486-489).
Peer reviewed

Jiang, X., Seeger, J. I., Kraft, M., & Boser, B. E. (2000). A monolithic surface micromachined Z-axis gyroscope with digital output. In 2000 Symposium on VLSI Circuits (pp. 16-19). doi:10.1109/VLSIC.2000.852839
Peer reviewed

Sehr, H, Evans, AGR, Brunnschweiler, A., Ensell, GJ, & Kraft, M. (2000). A3-dimensional actuator based on a novel combination of thermally actuated planar and vertical bimorphs. In Proc. 7th Int. Conf. On New Actuators (pp. 486-489).
Peer reviewed

Jiang, X, Seeger, JI, Kraft, M., & Boser, BE. (2000). A Monolithic surface micromachined Z-axis gyroscope with digital output. In Proc. Symposium on VLSI Circuits (pp. 16-19).
Peer reviewed

Kraft, M., & Evans, A. (2000). System level simulation of an electrostatically levitated disk. In International Conference on Modeling and Simulation of Microsystems : MSM 2000 (pp. 130-133).
Peer reviewed

Seeger, J. I., Jiang, X., Kraft, M., & Boser, B. E. (2000). Sense finger dynamics in a SD force-feedback gyroscope. In Technical digest - Solid-State Sensor and Actuator Workshop : 2000, Hilton Head Island, South Carolina, June 4 - 8 (pp. 296-299). Cleveland Heights, United States - Ohio: Transducers Research Foundation.

Schabmueller, CGJ, Koch, M, Kraft, M., Evans AGR, & Brunnschweiler, A. (2000). Design and Fabrication of a self-aligning gas/liquid micropump. In Proc. SPIE Micromachining and Microfabrication Conference - Microfluid Devices and Systems III (pp. 282-290).
Peer reviewed

Kraft, M., Farooqui, M. M., & Evans, A. G. R. (2000). Modelling and design of an electrostatically levitated disk. In MME '00, Micromechanics Europe.
Peer reviewed

Kraft, M. (2000). micromachined inertial sensors: the state-of-the-art and a look into the future. Measurement and Control, 33 (6), 164-168. doi:10.1177/002029400003300601
Peer Reviewed verified by ORBi

Schabmueller, CGJ, Koch, M, Kraft, M., Evans, AGR, & Brunnschweiler, A. (2000). Design and Fabrication of a self-aligning gas/liquid micropump. In Proc. SPIE Micromachining and Microfabrication Conference - Microfluid Devices and Systems III (pp. 282-290).
Peer reviewed

Gaura, E., Kraft, M., Steele, N, & Rider, RJ. (1999). A comparison of approaches for the design of closed-loop micromachined accelerometers. In Proc. 13th International Conference on Systems Engineering (pp. 163-168).
Peer reviewed

Kraft, M., & Lewis, C. P. (1998). System level simulation of a digital accelerometer. In Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems : MSM 98 (pp. 267-272).
Peer reviewed

Kraft, M., Lewis, C. P., & Hesketh, T. G. (1998). Closed-loop silicon accelerometers. IEE Proceedings. Circuits, Devices and Systems, 145 (5), 325-331. doi:10.1049/ip-cds:19982275
Peer Reviewed verified by ORBi

Kraft, M., Lewis, C. P., Hesketh, T. G., & Szymkowiak, S. (1998). A novel micromachined accelerometer capacitive interface. Sensors and Actuators. A, Physical, 68 (1-3), 466-473. doi:10.1016/S0924-4247(98)00064-8
Peer Reviewed verified by ORBi

Lewis, C. P., Hesketh, T. G., Kraft, M., & Florescu, M. (1998). A digital pressure transducer. Transactions of the Institute of Measurement and Control, 20 (2), 98-102. doi:10.1177/014233129802000207
Peer Reviewed verified by ORBi

Kraft, M., Lewis, C. P., Hesketh, T. G., & Szymkowiak, S. (1997). A novel micromachined accelerometer capacitive interface. In Proceedings Eurosensors XI (pp. 1017-1020).
Peer reviewed

Kraft, M. (1997). Closed loop digital accelerometer employing oversampling conversion [Doctoral thesis, Coventry University]. ORBi-University of Liège. https://orbi.uliege.be/handle/2268/200015

Kraft, M., & Lewis, C. P. (1997). A generic approach to closed loop, digital transducers. In Sensor 97 (pp. 1, pp. 269-273).
Peer reviewed

Kraft, M., Lewis, C. P., & Hesketh, T. G. (1997). Control system design study for a micromachined accelerometer. In New trends in design of control systems 1997 : a proceedings volume from the 2nd IFAC workshop (pp. 128-132).
Peer reviewed

Lewis, C. P., & Kraft, M. (1996). Simulation of a micromachined digital accelerometer in SIMULINK and PSPICE. In UKACC International Conference on Control '96 (pp. 1, pp. 205-209). doi:10.1049/cp:19960553
Peer reviewed

Kraft, M., Lewis, C. P., Hesketh, T. G., & Tulmann, J. (1996). Signal pick-off in micromachined accelerometers. In Proceedings of the 5th International Conference on Optimization of Electric and Electronic Equipments (pp. 391-399).
Peer reviewed

Lewis, C. P., Hesketh, T. G., & Kraft, M. (1996). An electric current transducer for industrial use. In Proceedings of the 5th International Conference on Optimization of Electric and Electronic Equipments (pp. 263-266).
Peer reviewed

Lewis, C. P., Hesketh, T. G., & Kraft, M. (1996). A low cost electric current transducer. In Proceedings / 7th International Power Electronics \& Motion Control Conference (pp. 1, pp. 351-354).
Peer reviewed

Kraft, M., Lewis, C. P., & Hesketh, T. G. (1996). Development of a digital accelerometer for low-frequency structural vibration measurement. In The 1996 Sensor and Transducer Conference Proceedings.
Peer reviewed

Lewis, C. P., Hesketh, T. G., & Kraft, M. (1996). Characterization and modelling of a micromachined accelerometer. In Proceedings of the 12th International Conference on Systems Science (pp. 218-223).
Peer reviewed

Lewis, C. P., Kraft, M., & Hesketh, T. G. (1996). Mathematical model for a micromachined accelerometer. Transactions of the Institute of Measurement and Control, 18 (2), 92-98. doi:10.1177/014233129601800204
Peer Reviewed verified by ORBi

Lewis, C., & Kraft, M. (1995). A micormachined, digital, closed-loop accelerometer. In Proc. AUTOTECH '95.
Peer reviewed

Lewis, C., Kraft, M., & Hesketh, T. (1995). Design and develoment of a digital transducer. In Proc. AEROTECH 95.
Peer reviewed

Lewis, C. P., Kraft, M., & Hesketh, T. G. (1995). Developments in digital transducers for vehicle control and telemetric instrumentation. In Intelligent autonomous vehicles 1995 (pp. 32-36).
Peer reviewed

Kraft, M., Lewis, C. P., & Hesketh, T. G. (1995). Characterization and modelling of a digital micromachined accelerometer. In ICSEng '96 - 11th International Conference on Systems Engineering (pp. 2 pp. 143-149).
Peer reviewed

Lewis, C. P., Kraft, M., & Hesketh, T. G. (1994). The development of a digital accelerometer. In Proceedings 27th ISATA - International Symposium on Automotive Technology and Automation (pp. 873-879).
Peer reviewed

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