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Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications
Pustan, Marius; Belcin, Oliviu; Golinval, Jean-Claude
2011In Arghir, Mariana (Ed.) Acta Technica Napocensis of The Technical University of Cluj-Napoca
 

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Keywords :
Mechanical oscillators; frequency response; electrostatic actuation; multiphysics coupling
Abstract :
[en] The dynamic behaviour of paddle MEMS cantilever oscillators under electrostatic actuation is investigated and presented in this paper. The scope is to estimate the influence of the geometrical dimensions and operating conditions on the frequency response of mechanical paddle cantilevers fabricated from polysilicon. Theoretical approach and finite element analysis are developed considering the multiphysics coupling between the electrical field and the mechanical structure of oscillators. The;experimental tests are performed under ambient condition and in vacuum in order to characterize the effect of operating condition on the frequency response of paddle cantilevers.
Disciplines :
Mechanical engineering
Author, co-author :
Pustan, Marius ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Belcin, Oliviu;  Technical University of Cluj-Napoca > Department of Machine Elements and Tribology
Golinval, Jean-Claude  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Dynamic investigations of paddle MEMS cantilevers used in mass sensing applications
Publication date :
2011
Event name :
The 3rd International Conference on Advanced Engineering in Mechanical Systems (ADEMS'11)
Event organizer :
Technical University of Cluj-Napoca
Event place :
Cluj-Napoca, Romania
Event date :
du 21 septembre 2011 au 23 septembre 2011
By request :
Yes
Audience :
International
Main work title :
Acta Technica Napocensis of The Technical University of Cluj-Napoca
Publishing director :
Arghir, Mariana
ISBN/EAN :
1221-5872
Collection name :
Vol. 54, Issue PSD, Series: Applied Mathematics and Mechanics
Pages :
117-122
Available on ORBi :
since 07 October 2011

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