Finite Element Modelling of Strong Electro-Mechanical Coupling in MEMS

Doctoral thesis (Dissertations and theses)

Rochus, Véronique

2006

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https://hdl.handle.net/2268/8880

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Keywords :

MEMS; FEM; Electromechanical coupling

Disciplines :

Aerospace & aeronautics engineering
Engineering, computing & technology: Multidisciplinary, general & others

Author, co-author :

Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures

Language :

English

Title :

Finite Element Modelling of Strong Electro-Mechanical Coupling in MEMS

Defense date :

10 February 2006

Number of pages :

239

Institution :

ULiège - Université de Liège

Funders :

F.R.S.-FNRS - Fonds de la Recherche Scientifique

Available on ORBi :

since 19 January 2010

Number of views

164 (16 by ULiège)

Number of downloads

9 (5 by ULiège)