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Electro-mechanical Coupling in MEMS: Modeling and Experimental Validation
Rochus, Véronique; Golinval, Jean-Claude
2007
 

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Keywords :
Finite Element Method; Electro-mechanical micro systems; Modal Analysis
Abstract :
[en] This paper presents the advantages of a strong coupled formulation to model the electro-mechanical coupling appearing in MEMS. The classical modeling approach is to use a staggered methodology iterating between two different programs to obtain the solution of the coupled problem. In this research a strong coupled formulation is proposed and a tangent stiffness matrix of the whole problem is computed. Using this matrix, nonlinear algorithms such as the Riks-Crisfield algorithm may be applied to solve the static nonlinear problem and accurately determine the static pull-in voltage. Moreover, the natural frequencies may be computed around each equilibrium positions. The dynamic behavior of the structure may also be studied and two new parameters are defined: the dynamic pull-in voltage and the dynamic pull-in time. This strong coupled methodology deriving from variational principle may also be used for topology optimization and extended finite elements.
Disciplines :
Engineering, computing & technology: Multidisciplinary, general & others
Mechanical engineering
Author, co-author :
Rochus, Véronique ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Golinval, Jean-Claude  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Electro-mechanical Coupling in MEMS: Modeling and Experimental Validation
Publication date :
2007
Number of pages :
12
Event name :
International Workshop: Advancements in Design Optimization of Materials, Structures and Mechanical Systems
Event organizer :
Nortwestern Polytechnical University
Event place :
Xi'An, China
Event date :
du 17 au 20 décembre 2007
Audience :
International
Available on ORBi :
since 04 December 2009

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