Accelerometer; closed-loop system; genetic algorithm (GA); microelectromechanical systems (MEMS); microlevers; system-level optimization; Closed-loop system; Co-optimization; Electro-mechanical; Freeform geometry; Genetic algorithm; Geometry optimization; Micro-levers; Microelectromechanical system; Microelectromechanical systems accelerometers; System level optimization; Electronic, Optical and Magnetic Materials; Condensed Matter Physics; Mechanical Engineering; Electrical and Electronic Engineering
Abstract :
[en] This paper describes a novel, system-level design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. A MEMS accelerometer comprising a freeform mechanical motion preamplifier embedded in a closed-loop control system is presented to demonstrate the effectiveness of the design approach. The optimization process improves the main figure-of-merit (FOM) by 482%. Measurements show that the displacement of the MEMS accelerometer in the closed-loop system is decreased by 86% with a 4.85 V feedback voltage for 1 g acceleration at 100 Hz compared with an open-loop system.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Wang, Chen ; Université de Liège - ULiège > Montefiore Institute of Electrical Engineering and Computer Science ; College of Optical Science and Engineering, Zhejiang University, China ; ESAT-MNS, University of Leuven, Belgium
Quan, Aojie; ESAT-MNS, University of Leuven, Belgium
Fang, Weidong; College of Optical Science and Engineering, Zhejiang University, China
Huang, Haoyu; College of Optical Science and Engineering, Zhejiang University, China
Wang, Linlin; ESAT-MNS, University of Leuven, Belgium
Gidts, Michiel; ESAT-MNS, University of Leuven, Belgium
Guan, Yangyang; ESAT-MNS, University of Leuven, Belgium
Liu, Huafeng; PGMF and School of Physics, Huazhong University of Science and Technology, China
Zhang, Hemin; ESAT-MNS, University of Leuven, Belgium
Bai, Jian; College of Optical Science and Engineering, Zhejiang University, China
Wang, Yuan ; Université de Liège - ULiège > Département d'électricité, électronique et informatique (Institut Montefiore) > Systèmes microélectroniques intégrés ; PGMF and School of Physics, Huazhong University of Science and Technology, China
Kraft, Michael ; Université de Liège - ULiège > Département d'électricité, électronique et informatique (Institut Montefiore) > Systèmes microélectroniques intégrés ; ESAT-MNS, University of Leuven, Belgium
Language :
English
Title :
A Mems Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm
Publication date :
2022
Event name :
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Event place :
Tokyo, Japan
Event date :
09-01-2022 => 13-01-2022
Main work title :
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher :
Institute of Electrical and Electronics Engineers Inc.
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