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A Mems Electro-Mechanical Co-Optimization Platform Featuring Freeform Geometry Optimization Based on a Genetic Algorithm
Wang, Chen; Quan, Aojie; Fang, Weidong et al.
2022 • In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

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A_Mems_Electro-Mechanical_Co-Optimization_Platform_Featuring_Freeform_Geometry_Optimization_Based_on_a_Genetic_Algorithm.pdf

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