Insight about magnetron sputtering using Life Cycle Assessment

Unpublished conference/Abstract (Scientific congresses and symposiums)

Merlo, Antoine; Léonard, Grégoire

2020 • MSE Congress

Permalink
https://hdl.handle.net/2268/251165

MSEpresentationV1_GL.pdf

Publisher postprint (1.02 MB)

All documents in ORBi are protected by a user license.

Keywords :

LCA; magnetron sputtering

Disciplines :

Chemical engineering

Author, co-author :

Merlo, Antoine ; Université de Liège - ULiège > Department of Chemical Engineering > LASSC (Labo d'analyse et synthèse des systèmes chimiques)

Léonard, Grégoire ; Université de Liège - ULiège > Department of Chemical Engineering > Intensif.des procéd. de l'indust.chim.basée sur l'anal.syst.

Language :

English

Title :

Insight about magnetron sputtering using Life Cycle Assessment

Publication date :

24 September 2020

Event name :

MSE Congress

Event date :

22 au 25 Septembre

Audience :

International

Name of the research project :

PULSATEC

Funders :

Interreg Grande Région

Available on ORBi :

since 29 September 2020

Number of views

87 (16 by ULiège)

Number of downloads

92 (5 by ULiège)