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A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing
Boutaayamou, Mohamed; V Sabariego, Ruth; Dular, Patrick
2008In Proceedings of the 9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
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Keywords :
Finite Element Method; Electrostatic MEMS
Abstract :
[en] This paper deals with the coupled electrostatic- mechanical analysis of electrostatically actuated MEMS. An iterative perturbation procedure in conjunction with the finite element method is used to solve the coupled problem without the need of remeshing the whole electric domain. The method offers the advantage of overcoming degenerated finite elements in the mesh of some electric regions where the deflection of the MEMS moving parts is critical. The actuation of such systems is achieved by applying either an electric voltage or a global charge.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Boutaayamou, Mohamed ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques
V Sabariego, Ruth ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Dular, Patrick ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)
Language :
English
Title :
A Perturbation Finite Element Method for Modeling Electrostatic MEMS without Remeshing
Publication date :
2008
Event name :
9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
Event place :
Freiburg, Germany
Event date :
April
Audience :
International
Main work title :
Proceedings of the 9th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2008)
ISBN/EAN :
978-1-4244-2127-5
Peer reviewed :
Peer reviewed
Available on ORBi :
since 23 September 2009

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