Article (Scientific journals)
Study on actuating voltage and switching time of a MOEMS optical switch
Sun, Dong-Ming; Dong, Wei; Guo, W. et al.
2005In Optics and Laser Technology, 37 (8), p. 601-607
 

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Abstract :
[en] The micro-opto-electro-mechanical systems (MOEMS) optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Based on the torsion dynamics theory, the technique and relative formula are presented for the first time for analyzing the actuating voltage and the switch time. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). Finally, the difference between the experimental results and theoretical data is discussed.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Sun, Dong-Ming
Dong, Wei
Guo, W.
Liu, Cai-Xia
Wang, G. D.
Yan, X.
Xu, Bin ;  Université de Liège - ULiège > Département de physique > Physique des matériaux et nanostructures
Chen, Wei-You Y.
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Study on actuating voltage and switching time of a MOEMS optical switch
Publication date :
2005
Journal title :
Optics and Laser Technology
ISSN :
0030-3992
Publisher :
Elsevier, Netherlands
Volume :
37
Issue :
8
Pages :
601-607
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