Analysis of the dynamic behaviour of a torsional micro-mirror

[en] Abstract In this paper, the results of the dynamic pull-in voltage characteristics of a micro-mirror using electrostatic actuation are analyzed. Based on torsional dynamic theory, appropriate equations are developed that allowed to give insight into the actuating voltage, switching time and other dynamic parameters. The analytical results are discussed in detail without and with considering air squeeze ﬁlm damping, respectively. This is equivalent to assuming the mirror is operated in vacuum or at ambient pressure. When the effect of the damping is considered, the movement trajectory of the cantilever beam is changed, and the calculated results of the pull-in voltage and switching time are considerably different compared to those without considering damping. Therefore, the effect of the air squeeze ﬁlm damping is an important factor in the design and fabrication of micro-electro-mechanical systems. Finally, the experimental results in the air environment are discussed and compared to the theoretical analysis.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Sun, Dong-Ming

Dong, Wei

Liu, Cai-Xia

Chen, Wei-You Y.

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Analysis of the dynamic behaviour of a torsional micro-mirror

Publication date :

2007

Journal title :

Microsystem Technologies

ISSN :

0946-7076

eISSN :

1432-1858

Publisher :

Springer, Berlin, Germany

Volume :

Issue :

Pages :

61-70

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

http://link.springer.com/article/10.1007\%2Fs00542-006-0257-1

Available on ORBi :

since 13 April 2016

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Bibliography

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