Article (Scientific journals)
Analytical model of micromachining of brittle materials with sharp particles
Moktadir, Zakaria; Wensink, Henk; Kraft, Michael
2005In Microelectronics Journal, 36 (3-6)
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Abstract :
[en] We present an analytical model for the powder blasting of brittle materials with sharp particles. We developed a continuum equation, which describes the surface evolution during the powder blasting, into which we introduced surface energetics as the major relaxation mechanism. The experimental and the calculated erosion rates match extremely well. Also, the developed model explains why the sidewalls of a powder blasted channel are not straight, e.g. have a blast lag, for which we also found a good agreement between experiments and theory.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Moktadir, Zakaria
Wensink, Henk
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Analytical model of micromachining of brittle materials with sharp particles
Publication date :
2005
Journal title :
Microelectronics Journal
ISSN :
0026-2692
Publisher :
Elsevier Science
Volume :
36
Issue :
3-6
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 25 January 2016

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