2014 • In Cunha, Álvaro; Caetano, Elsa; Ribeiro, Pedroet al. (Eds.) Proceedings of the 9th International Conference on Structural Dynamics, EURODYN 2014
[en] The first resonance frequency is a key performance characteristic of MEMS vibrometers. In batch fabrication, this first resonance frequency can exhibit scatter owing to various sources of manufacturing variability involved in the fabrication process. The aim of this work is to develop a stochastic multiscale model for predicting the first resonance frequency of MEMS microbeams constituted of polycrystals while accounting for the uncertainties in the microstructure due to the grain orientations.
At the finest scale, we model the microstructure of polycrystaline materials using a random Voronoï tessellation, each grain being assigned a random orientation. Then, we apply a computational homogenization procedure on statistical volume elements to obtain a stochastic characterization of the elasticity tensor at the second scale of interest, the meso-scale. In the future, using a stochastic finite element method, we will propagate these meso-scale uncertainties to the first resonance frequency at the coarser scale.
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