[en] Undesirable stiction, which results from contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study the MEMS behavior, and thus its life-time. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch.
Research Center/Unit :
Computational & Multiscale Mechanics of Materials
Disciplines :
Mechanical engineering
Author, co-author :
Wu, Ling ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Noels, Ludovic ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
ON THE MODELING OF ADHESIVE CONTACT AND STICTION FAILURE IN MICRO-SWITCHES
Publication date :
April 2013
Event name :
MEDYNA 2013: 1st Euro-Mediterranean Conference on Structural Dynamics and Vibroacoustics
Event organizer :
ADYVA: The French association for Structural Dynamics and Vibroacoustics SFA-GVB: The Vibroacoustic group of the French Society of Acoustic AMVA: The Moroccan Association for Acoustic and Vibration ATAVI: The Tunisian association for Acoustic and Vibration IOA : The Institute of Acoustic of the Chinese Academy of Sciences
