NOTICE: this is the author’s version of a work that was accepted for publication in Tribology International. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Tribology International, [VOL 57, 2013] DOI: 10.1016/j.triboint.2012.08.003
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Abstract :
[en] Stiction is a major failure mode in micro-electromechanical systems. In previous works, a statistical rough surfaces interaction model, for which only elastic adhesive contact has been considered, was developed for multiscale analyzes.
However, during the impact between rough surfaces, plastic deformations of asperities cannot always be neglected. In the present work, the adhesion between rough surfaces is studied considering the elasto-plastic deformations of the asperities, and a model predicting the resulting micro adhesive-contact forces is derived.
For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force evolution during cyclic loading is predicted using the developed model.
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