[en] This paper describes the studies of the mechanical characteristics of flexible MEMS components including theoretical approaches, finite element analysis and experimental investigations. Modeling and finite element analyses together with theoretical and experimental investigations are performed to estimate the elastic behavior of MEMS components as microcantilevers, microbridges and micromembranes. Finite element analysis of microcomponents deflections under different loading and the stress distribution in beams are determined and compared with the experimental measurements performed using an atomic force microscope. The modeling of a micromembrane supported by four hinges that enable out-of-plane motion is presented. Finite element analysis and experimental investigations are performed to visualize the deflection of the mobile part of the micromembrane under an applied force and the stress distribution in hinges. In additional, this paper provides analytical relations to compute the stiffness and the stress of the investigated flexible MEMS components.
Research Center/Unit :
Division de la Recherche et de la Coopération Scientifique
Disciplines :
Aerospace & aeronautics engineering
Author, co-author :
Pustan, Marius ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Paquay, Stéphane
Rochus, Véronique
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Modeling and finite element analysis of mechanical behavior of flexible MEMS components
Publication date :
25 April 2011
Journal title :
Microsystem Technologies
ISSN :
0946-7076
eISSN :
1432-1858
Publisher :
Springer Science & Business Media B.V.
Special issue title :
foreword to special issue on design, test, integration and packaging of MEMS/MOEMS, 2010
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