[en] We present the manufacturing and measurement results obtained with a mid-infrared (L-band ~ 3.8 µm) diamond Annular Groove Phase Mask (AGPM) coronagraph (Mawet et al 20051), using subwavelength gratings and diamond-optimized micro-fabrication techniques such as Nano-Imprint Lithography and Reactive Ion Etching.
Disciplines :
Space science, astronomy & astrophysics
Author, co-author :
Delacroix, Christian ; Université de Liège - ULiège > Département de physique > Optique - Hololab
Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab
Karlsson, Mikael
Nikolajeff, Fredrik
Forsberg, Pontus
Kuittinen, Markku
Vartiainen, Ismo
Language :
English
Title :
Diamond subwavelength gratings for mid-infrared AGPM coronagraph: manufacturing assessment
