A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS

Boutaayamou, Mohamed; V Sabariego, Ruth; Dular, Patrick

doi:10.1109/ESIME.2007.359942

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A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS

Boutaayamou, Mohamed; V Sabariego, Ruth; Dular, Patrick

2007 • In Proceedings of the 8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems

Peer reviewed

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https://hdl.handle.net/2268/83507

DOI
10.1109/ESIME.2007.359942

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Abstract :

[en] In this paper, a finite element (FE) procedure for modeling electrostatically actuated MEMS is presented. It concerns a perturbation method for computing electrostatic field distortions due to moving conductors. The computation is split in two steps. First, an unperturbed problem (in the absence of certain conductors) is solved with the conventional FE method in the complete domain. Second, a perturbation problem is solved in a reduced region with an additional conductor using the solution of the unperturbed problem as a source. When the perturbing regions are close to the original source field, an iterative computation may be required. The developed procedure offers the advantage of solving sub-problems in reduced domains and consequently of benefiting from different problem-adapted meshes. This approach allows for computational efficiency by decreasing the size of the problem.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Boutaayamou, Mohamed ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Capteurs et systèmes de mesures électriques

V Sabariego, Ruth ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)

Dular, Patrick ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE)

Language :

English

Title :

A Perturbation Method for the 3D Finite Element Modeling of Electrostaticaly Driven MEMS

Publication date :

April 2007

Event name :

8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSimE2007)

Event place :

London, United Kingdom

Event date :

April 16-18, 2007

Audience :

International

Main work title :

Proceedings of the 8th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems

Main work alternative title :

[en] Proceedings of EuroSimE2007

Publisher :

IEEE

ISBN/EAN :

1-4244-1105-X

Collection name :

IEEE Catalog Number: 07EX1736

Pages :

50-54

Peer reviewed :

Peer reviewed

Additional URL :

http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4201139

Available on ORBi :

since 02 February 2011

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Bibliography

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Boutaayamou, M., Nair, K. H., Sabariegoi R. V., Dular, P., "Finite Element Modeling of Electrostatic MEMS Including the impact of Fringing Field Effects on Forces," Proc 7th EuroSimE 2006, Como, Italy, April, pp. 417-421.
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Dular, P., Sabariego, R. V., "A perturbation method for computing field distortions due to conductive regions with h-conform magnetodynamic finite element formulations," to be published in IEEE Trans. Mag., 2007.
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