Adaptation of photorefractive holographic camera for observation of micro-mechanical structures

Georges, Marc; Thizy, Cédric; Loicq, Jerôme; Habraken, Serge; Wong Kwan, Vunfu; O'Mahony, Conor; Slattery, Orla

Paper published in a book (Scientific congresses and symposiums)

Georges, Marc; Thizy, Cédric; Loicq, Jerôme et al.

2007 • In Hesselink, L.; Feinberg, J. (Eds.) Controlling Light with Light: Photorefractive Effects, Photosensitivity, Fiber Gratings, Photonic Materials and More (PR07)

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Keywords :

photorefractive crystals; MEMS

Abstract :

[en] The photorefractive holographic camera initially working on large scattering objects has been adapted to observe centimetric to micrometric objects. Application on micro-mechanical systems is presented

Disciplines :

Physics

Author, co-author :

Georges, Marc ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Thizy, Cédric ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Loicq, Jerôme ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Habraken, Serge ; Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)

Wong Kwan, Vunfu

O'Mahony, Conor

Slattery, Orla

Language :

English

Title :

Adaptation of photorefractive holographic camera for observation of micro-mechanical structures

Publication date :

October 2007

Event name :

Controlling Light with Light: Photorefractive Effects, Photosensitivity, Fiber Gratings, Photonic Materials and More (PR07)

Event organizer :

Optical Society of America

Event place :

Squaw Creek, Lake Tahoe, CA, United States

Event date :

14-17 October 2007

Audience :

International

Main work title :

Controlling Light with Light: Photorefractive Effects, Photosensitivity, Fiber Gratings, Photonic Materials and More (PR07)

Editor :

Hesselink, L.

Feinberg, J.

Publisher :

Optical Society of America, Washington DC, United States

ISBN/EAN :

1-55752-848-9

Collection name :

OSA Technical Digest

Pages :

MB55

Name of the research project :

European Network of Excellence DfMM-PATENT

Funders :

UE - Union Européenne

Available on ORBi :

since 27 November 2010

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Bibliography

Ph.C. Lemaire and M.P. Georges, "Dynamic holographic interferometry : devices and applications" in Photorefractive Materials and Their Applications 3, P. Günter and J-P. Huignard, eds, Springer Series in Optical Sciences Vol 115, pp.223-251 (2007)
www.optrion-tech.com
M. Hill, C. O'Mahony, H. Berney, P.J. Hughes, E. Hynes, W.A. Lane, "Verification of 2-D MEMS model using optical profiling techniques", Opt. Lasers in Eng. 36, pp. 169-183 (2001)
S. Seebacher, W. Osten, T. Baumbach, W. Jüptner, "The determination of material parameters of microcomponents using digital holography", Opt. Lasers in Eng. 36, pp. 103-126 (2001)
P. Aswendt, C-D. Schmidt, D. Zielke, S. Schubert, "ESPI solution for non-contacting MEMS-on-wafer testing", Opt. Lasers in Eng. 40, pp. 501-515 (2003)
P. Aswendt, "Promise and challenge of DUV speckle interferometry", Proc. SPIE 4933 on Speckle Metrology 2003, pp.117-122 (2003).
M. Kujawinska, "Modern optical measurement station for micro-materials and micro-element studies", Sensors and Actuators A 99, pp. 144-153 (2002)
M. Georges, C. Thizy, J. Tiberghien, Ph. Lemaire, "Adaptation of a photorefractive holographic interferometer for analysis of centimetric to micrometric objects", Proc SPIE 6341 on Speckle 06, paper 634139 (2006)