Cyclical loading; Fatigue failure; Frequency responses
Abstract :
[en] The influence of geometrical dimensions on the dynamical behavior of polysilicon MEMS structures configurations is studied and presented in this paper. Electrostatically actuated MEMS components as microbridges and microcantilevers are used to investigate the coupled electro-mechanic effect, frequency responses and the dynamic bending stress. The electrostatic principle is common in sensing and acting devices and there are many MEMS structures subjected to electrostatic forces.
Research Center/Unit :
Université de Liège, Département Aérospatiale et Mécanique Technical University of Cluj-Napoca, Department of Machine Elements and Tribology
Disciplines :
Mechanical engineering
Author, co-author :
Pustan, Marius ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Geometrical Effects on the Dynamical Behavior of MEMS structures
Publication date :
16 May 2010
Event name :
European Conference on Computational Mechanics (ECCM 2010)
Event organizer :
ECCOMAS - European Community on Computational Methods in Applied Sciences
Event place :
Paris, France
Event date :
May 16-21, 2010
By request :
Yes
Audience :
International
Peer reviewed :
Peer reviewed
Name of the research project :
Project MOMIVAL
Funders :
Ministère de la Région Wallonne, Division de la Recherche et de la Coopération Scientifique in the framework Programme FIRST Post-Doc
