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Paper published in a book (Scientific congresses and symposiums)
Vapor phase doping with N-type dopant into silicon by atmospheric pressure chemical vapor deposition
Takeuchi, Shotaro; Nguyen, Ngoc Duy; Leys, Frederik et al.
2008 • In 214th ECS Meeting, 2008
Peer reviewed
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Keywords :
Vapor phase doping; Type doping; Atmospheric pressure chemical vapor deposition
Disciplines :
Materials science & engineering
Author, co-author :
Takeuchi, Shotaro;  IMEC
Nguyen, Ngoc Duy  ;  IMEC
Leys, Frederik;  IMEC
Loo, Roger;  IMEC
Conard, Thierry;  IMEC
Vandervorst, Wilfried;  IMEC
Caymax, Matty;  IMEC
Language :
English
Title :
Vapor phase doping with N-type dopant into silicon by atmospheric pressure chemical vapor deposition
Publication date :
2008
Event name :
214th ECS Meeting, 2008
Event organizer :
ECS
Event place :
Honolulu, United States
Event date :
12-17/10/2008
Audience :
International
Main work title :
214th ECS Meeting, 2008
Publisher :
ECS, Pennington, United States
ISBN/EAN :
2151-2043
Collection name :
ECS Meeting Abstracts MA2008-02
Peer reviewed :
Peer reviewed
Available on ORBi :
since 13 August 2010

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