Strained silicon-on-insulator - Fabrication and characterization

Reiche, M.; Himcinschi, C.; Gösele, U.; Christiansen, S.; Mantl, S.; Buca, D.; Zhao, Q. T.; Feste, S.; Loo, R.; Nguyen, Ngoc Duy; Buchholtz, W.; Wei, A.; Horstmann, M.; Feijoo, D.; Storck, P.

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Strained silicon-on-insulator - Fabrication and characterization

Reiche, M.; Himcinschi, C.; Gösele, U. et al.

2007 • In 211th ECS Meeting, 2007

Peer reviewed

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https://hdl.handle.net/2268/69097

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Keywords :

Strained silicon-on-insulato; Growth

Disciplines :

Materials science & engineering

Author, co-author :

Reiche, M.; MPI für Mikrostrukturphysik

Himcinschi, C.; MPI für Mikrostrukturphysik

Gösele, U.; MPI für Mikrostrukturphysik

Christiansen, S.; MPI für Mikrostrukturphysik

Mantl, S.; Forschungszentrum Jülich

Buca, D.; Forschungszentrum Jülich

Zhao, Q. T.; Forschungszentrum Jülich

Feste, S.; Forschungszentrum Jülich

Loo, R.; IMEC

Nguyen, Ngoc Duy ; IMEC

More authors (5 more)

Language :

English

Title :

Strained silicon-on-insulator - Fabrication and characterization

Publication date :

2007

Event name :

211th ECS Meeting

Event organizer :

ECS

Event place :

Chicago, United States

Event date :

6-10/5/2007

Audience :

International

Main work title :

211th ECS Meeting, 2007

Publisher :

ECS, Pennington, United States

ISBN/EAN :

2151-2043

Collection name :

ECS Meeting Abstract MA2007-01

Peer reviewed :

Peer reviewed

Available on ORBi :

since 13 August 2010

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