Conformal doping of FINFET's : a fabrication and metrology challenge

Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay; Jurczak, Malgorzata; Nguyen, Ngoc Duy; Takeuchi, Shotaro; Leys, Frederik; Loo, Roger; Caymax, Matty; Everaert, Jean-Luc

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Conformal doping of FINFET's : a fabrication and metrology challenge

Vandervorst, Wilfried; Eyben, Pierre; Mody, Jay et al.

2008 • 17th International Conference in Ion Implantation Technology

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https://hdl.handle.net/2268/68738

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Keywords :

Conformal doping; FinFET

Disciplines :

Electrical & electronics engineering

Author, co-author :

Vandervorst, Wilfried; IMEC

Eyben, Pierre; IMEC

Mody, Jay; IMEC

Jurczak, Malgorzata; IMEC

Nguyen, Ngoc Duy ; IMEC

Takeuchi, Shotaro; IMEC

Leys, Frederik; IMEC

Loo, Roger; IMEC

Caymax, Matty; IMEC

Everaert, Jean-Luc; IMEC

Language :

English

Title :

Conformal doping of FINFET's : a fabrication and metrology challenge

Publication date :

2008

Event name :

17th International Conference in Ion Implantation Technology

Event organizer :

Spansion, Texas Instruments, University of Illinois

Event place :

Monterey, United States

Event date :

8-13/6/2008

By request :

Yes

Audience :

International

Available on ORBi :

since 12 August 2010

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