Lobontiu, N. et al, Mechanics of Microelectromechanical Systems (New York, 2004).
Pustan, M. et al, Mechanical and tribological characterizations of MEMS structures (Cluj-Napoca, 2007).
Pustan, M. et al, "Mechanical properties of flexible microcomponents with a mobile load,"J. Micromech. Microeng, Vol. 17, (2007), pp. 1611-1617. (Pubitemid 47214523)
Rebeiz, G. M., RF MEMS - Theory, Design and Technology (New Jersey, 2003)
Allameh, S. M. "An introduction to mechanical-properties-related issues in MEMS structure," J. Matter. Sci, Vol. 38, (2007), pp. 4115-41123.
