Portable x-ray fluorescence spectrometer for coating thickness measurement

[en] A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1-1500 nm in an industrial environment. Accuracy of similar to 3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used. (C) 2007 American Institute of Physics.

Disciplines :

Physics

Author, co-author :

Carapelle, Alain ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Fleury-Frenette, Karl ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Collette, Jean-Paul ; Université de Liège - ULiège > CSL (Centre Spatial de Liège)

Garnir, Henri-Pierre ; Université de Liège - ULiège > Département de physique > Physique nucléaire, atomique et spectroscopie

Harlet, Philippe

Language :

English

Title :

Portable x-ray fluorescence spectrometer for coating thickness measurement

Publication date :

2007

Journal title :

Review of Scientific Instruments

ISSN :

0034-6748

eISSN :

1089-7623

Publisher :

American Institute of Physics, New York, United States - New York

Volume :

Issue :

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 26 January 2009

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Bibliography

A. Attaelmanan, S. Larsson, A. Rindby, P. Voglis, and A. Kuczumow, Rev. Sci. Instrum. 65, 7 (1994).
C. Ribbing, M. Anderson, K. Hjort, and H. Lundqvist, Rev. Sci. Instrum. 74, 3423 (2003).
A. Longoni, Nucl. Instrum. Methods Phys. Res. A 409, 407 (1998).
D. Strivay, G. Weber, A. Marchal, M. Clar, and H. -P. Garnir, In Situ Non-Destructive Analysis and Testing of Museum Objects., Bratislava (Slovaquie), April 2005.
P. Lechener, S. Eckbauer, R. Hartmann, S. Krisch, D. Hauff, R. Richter, H. Soltau, L. Struder, C. Fiorini, E. Gatti, A. Longoni, and M. Sampietro, Nucl. Instrum. Methods Phys. Res. A 377, 346 (1996).
R. E. Van Grieken and A. A. Markowicsz, Handbook of X-Ray Spectrometry, Practical Spectroscopy Series Vol. 29, 2nd ed. (Dekker, New York, 2002) p. 366.
Handbook of X-Ray Spectrometry Second Edition, edited by, R. E. Van Grieken, and, A. A. Markowicsz, Practical Spectroscopy Series (Dekker, New York, 2002), Vol. 29, p. 243.
P. Lechener, C. Fiorini, R. Hartmann, J. Kemmer, N. Krause, P. Leutenegger, A. Longoni, H. Soltau, D. Stotter, R. Stotter, L. Struder, and U. Weber, Nucl. Instrum. Methods Phys. Res. A 458, 281 (2001).
R. E. Van Grieken and A. A. Markowicsz, Handbook of X-Ray Spectrometry, Practical Spectroscopy Series Vol. 29, 2nd ed. (Dekker, New York, 2002) p. 232.
See EPAPS Document No. E-RSINAK-78-063712. This document can be reached through a direct link in the online article's HTML reference section or via the EPAPS homepage (http://ww.aip.org/pubservs/epaps.html).
B. L. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
B. Vekemans, X-Ray Spectrom. 23, 278 (1994).