Scientific conference in universities or research centers (Scientific conferences in universities or research centers)
3-D Self-assembled SOI MEMS: Fabrication and Numerical Simulation
Méndez, Carlos; De Vincenzo, Pascal; Klapka, Igor et al.
2005
 

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Disciplines :
Mechanical engineering
Author, co-author :
Méndez, Carlos
De Vincenzo, Pascal
Klapka, Igor
Rochus, Véronique ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Iker, Francois
André, Nicolas
Raskin, Jean-Pierre
Language :
English
Title :
3-D Self-assembled SOI MEMS: Fabrication and Numerical Simulation
Publication date :
2005
Event name :
5TH ROUND TABLE ON MICRO/NANO TECHNOLOGIES FOR SPACE
Event organizer :
ESTEC
Event place :
Noordwijk, Netherlands
Audience :
International
Available on ORBi :
since 10 December 2009

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