Abstract :
[en] The dynamic response of electro-mechanically actuated
micro structures is governed by nonlinear effects which
directly influence their performance. To date, most work
in the field of micro/nano systems is done experimentally
and documented theoretical research consists of nonlinear
lumped-mass models as well as continuum mechanics approaches.
Existing and codified computational tools for
micro-electromechanical systems (MEMS) more and more
penetrate the market of designers and fabrication of such
devices. The present work is the experimental part of a
bench-mark study of a selected microbeam structure investigated
with aforementioned analytical and computational
techniques and compared to experiments performed with
a Polytec MSA400 analyzer. The emphasis of this benchmark
study is put on the nonlinear dynamic behavior with
respect to qualitative and quantitative explanations of the
electro-mechanical actuation and damping mechanisms.
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