Paper published in a journal (Scientific congresses and symposiums)
A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
Hastanin, Juriy; Renotte, Yvon; Fleury-Frenette, Karl et al.
2008In Proceedings of SPIE, 7113
Peer reviewed
 

Files


Full Text
5A0CD095-FF69-968C-71EA12C61BAF5DA2.pdf
Publisher postprint (459.12 kB)
Request a copy

All documents in ORBi are protected by a user license.

Send to



Details



Keywords :
surface plasmons; cantilever; micromechanical sensors
Abstract :
[en] This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multimaterial) micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
Disciplines :
Physics
Author, co-author :
Hastanin, Juriy ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Renotte, Yvon  ;  Université de Liège - ULiège > Département de physique > Département de physique
Fleury-Frenette, Karl ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Defise, Jean-Marc ;  Université de Liège - ULiège > CSL : Direction générale - Satellites, missions et instruments spatiaux
Habraken, Serge ;  Université de Liège - ULiège > Département de physique > Optique - Hololab - CSL (Centre Spatial de Liège)
Language :
English
Title :
A far infrared/terahertz micromechanical sensor based on surface plasmons resonance
Publication date :
2008
Event name :
SPIE
Audience :
International
Journal title :
Proceedings of SPIE
Special issue title :
Electro-Optical and Infrared Systems: Technology and Applications V
Volume :
7113
Peer reviewed :
Peer reviewed
Available on ORBi :
since 30 November 2009

Statistics


Number of views
274 (30 by ULiège)
Number of downloads
6 (5 by ULiège)

Scopus citations®
 
7
Scopus citations®
without self-citations
6
OpenCitations
 
2

Bibliography


Similar publications



Contact ORBi