Abstract :
[en] This paper describes a new concept related to the bolometric micromechanical sensors for detecting far IR and THz
radiation. We believe that this concept permits a low cost and ease of fabrication of large bi-dimensional array of sensors
with an enhanced signal-to-noise ratio. The micromechanical sensor comprises a thermo-sensitive bi-material (multimaterial)
micro-cantilever beam with a selective absorber dedicated to far IR and THz radiation energy, and optical
readout system based on surface plasmon resonance for detecting the bending of the micro-cantilever element. To
increase the radiation detector sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
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