Mg-doped Cu2O thin films with enhanced functional properties grown by magnetron sputtering under optimized pressure conditions

Sliti, Naama; Fourneau, Emile; Ratz, Thomas; Touihri, Saâd; Nguyen, Ngoc Duy

doi:10.1016/j.ceramint.2022.05.028

Article (Scientific journals)

Mg-doped Cu2O thin films with enhanced functional properties grown by magnetron sputtering under optimized pressure conditions

Sliti, Naama; Fourneau, Emile; Ratz, Thomas et al.

2022 • In Ceramics International

Peer Reviewed verified by ORBi

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https://hdl.handle.net/2268/290793

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10.1016/j.ceramint.2022.05.028

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Keywords :

MagnesiumCuprous oxideSputteringPlasma pressurep-type transparent conducting oxide

Abstract :

[en] Cu2O appears as a promising material for synthesizing p-type transparent semiconducting oxides with low electrical resistivity and high optical transmittance. We report on an exhaustive study of magnesium-doped cuprous oxide layers deposited by radio frequency magnetron sputtering. We present the characterization of the structural and optoelectronic properties of Mg:Cu2O thin films deposited at room temperature with varied argon plasma pressure. As a result, we found that by adjusting the Ar plasma pressure, Mg-doped Cu2O layers with high crystallinity combined with optimal electrical and optical properties can be synthesized. Using a plasma pressure of 13 mTorr, we obtained a transparent p-type material with crystallite size of 15 nm, electrical resistivity of 10.2 Ωcm, and optical band gap of 2.55 eV.

Disciplines :

Physics

Author, co-author :

Sliti, Naama ; Université de Liège - ULiège > Complex and Entangled Systems from Atoms to Materials (CESAM)

Fourneau, Emile ; Université de Liège - ULiège > Complex and Entangled Systems from Atoms to Materials (CESAM)

Ratz, Thomas ; Université de Liège - ULiège > Complex and Entangled Systems from Atoms to Materials (CESAM)

Touihri, Saâd

Nguyen, Ngoc Duy ; Université de Liège - ULiège > Complex and Entangled Systems from Atoms to Materials (CESAM)

Language :

English

Title :

Mg-doped Cu2O thin films with enhanced functional properties grown by magnetron sputtering under optimized pressure conditions

Publication date :

06 May 2022

Journal title :

Ceramics International

ISSN :

0272-8842

Publisher :

Elsevier BV

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

https://api.elsevier.com/content/article/PII:S0272884222015814?httpAccept=text/xml

Funders :

Ecole Nationale Supérieure d'Ingénieurs de Tunis
Université de Tunis
ULiège - Université de Liège

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