An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 μm CMOS

Accelerometers; Application specific integrated circuits; Bandwidth; Capacitance; Capacitive sensors; CMOS integrated circuits; Differential amplifiers; Integrated circuit design; MEMS; Operational amplifiers; Pressure sensors; Capacitance-to-voltage converters; Capacitive pressure sensors; Flexible interfaces; Fully differential; Measurement range; Micro electromechanical system (MEMS); Sensing elements; Sensor applications; Signal to noise ratio

Abstract :

[en] In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit) was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50zF/√Hz within a bandwidth of 10Hz to 10kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750fF to ±3pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0Hz to more than 50kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200ng/√Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR) of more than 100dB.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Utz, A.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Walk, C.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Haas, N.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Fedtschenko, T.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Stanitzki, A.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Mokhtari, M.; MIR Enterprises Limited, 173c Goldhurst Terrace, Hampstead-London, NW63ES, United Kingdom

Görtz, M.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany

Kraft, Michael ; Université de Liège - ULg

Kokozinski, R.; Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, Duisburg, 47057, Germany, Department of Electronic Components and Circuits, University of Duisburg-Essen, Bismarckstr. 81, Duisburg, 47057, Germany

Language :

English

Title :

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 μm CMOS

Publication date :

2017

Journal title :

Journal of Sensors and Sensor Systems

ISSN :

2194-8771

eISSN :

2194-878X

Publisher :

Copernicus Publications, Germany

Volume :

Issue :

Pages :

285-301

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 10 September 2021

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