Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Wang, Chen; Song, X.; Fang, W.; Chen, F.; Zeimpekis, I.; Wang, Y.; Quan, A.; Bai, J.; Liu, H.; Schropfer, G.; Welham, C.; Kraft, Michael

doi:10.1038/s41378-020-00214-1

Article (Scientific journals)

Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Wang, Chen; Song, X.; Fang, W. et al.

2020 • In Microsystems and Nanoengineering, 6 (1)

Peer Reviewed verified by ORBi

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https://hdl.handle.net/2268/263083

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10.1038/s41378-020-00214-1

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Keywords :

Accelerometers; Bandwidth; Degrees of freedom (mechanics); Fits and tolerances; Genetic algorithms; Geometry; MEMS; Microelectromechanical devices; Design approaches; Design Methodology; Fabrication tolerances; Mechanical motions; MEMS accelerometer; Micro electromechanical system (MEMS); Parameter mismatches; Sensitivity improvements; Design

Abstract :

[en] This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved. © 2020, The Author(s).

Disciplines :

Electrical & electronics engineering

Author, co-author :

Wang, Chen ; Université de Liège - ULiège > Montefiore Institute

Song, X.; PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

Fang, W.; College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China

Chen, F.; Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China

Zeimpekis, I.; ORC, University of Southampton, Southampton, SO17 1BJ, United Kingdom

Wang, Y.; PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

Quan, A.; ESAT-MICAS, University of Leuven, Leuven, 3001, Belgium

Bai, J.; College of Optical Science and Engineering, Zhejiang University, Hangzhou, 310027, China

Liu, H.; PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan, 430074, China

Schropfer, G.; Coventor—A Lam Research Company, Villebon sur Yvette, 91140, France

Welham, C.; Coventor—A Lam Research Company, Villebon sur Yvette, 91140, France

Kraft, Michael ; Université de Liège - ULg

Language :

English

Title :

Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithm

Publication date :

2020

Journal title :

Microsystems and Nanoengineering

eISSN :

2055-7434

Publisher :

Nature Publishing Group, United Kingdom

Volume :

Issue :

Peer reviewed :

Peer Reviewed verified by ORBi

Funders :

Natural Science Foundation of Hubei Province: 2019CFB108Science Challenge Project: TZ2016006-0502-02

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since 07 September 2021

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