Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any mediumor format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
All documents in ORBi are protected by a user license.
Yazdi, N., Ayazi, F. & Najafi, K. Micromachined inertial sensors. Proc. IEEE 86, 1640–1659 (1998). DOI: 10.1109/5.704269
Almutairi, B. & Kraft, M. Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers. Sens. Actuators A Phys. 186, 169–177 (2012). DOI: 10.1016/j.sna.2012.05.010
Sheng, B. et al. Design of a dual quantization electromechanical sigma–delta modulator MEMS vibratory wheel gyroscope. J. Microelectromech. Syst. 27, 218–230 (2018). DOI: 10.1109/JMEMS.2017.2787982
Palasagaram, J. N. & Ramadoss, R. MEMS-capacitive pressure sensor fabricated using printed-circuit-processing techniques. IEEE Sens. J. 6, 1374–1375 (2006). DOI: 10.1109/JSEN.2006.884430
Yang, S. & Xu, Q. A review on actuation and sensing techniques for MEMS-based microgrippers. J. Micro-Bio. Robot. 13, 1–14 (2017). DOI: 10.1007/s12213-017-0098-2
Littrell, R. J. High Performance Piezoelectric MEMS Microphones. Dissertations & Theses—Gradworks (2010).
Howell, L. L. Handbook of Compliant Mechanisms (John Wiley & Sons, Incorporated, 2013).
Middlemiss, R. P. et al. Measurement of the Earth tides with a MEMS gravimeter. Nature 531, 614 (2016). DOI: 10.1038/nature17397
Boom, B. A. et al. Nano-G accelerometer using geometric anti-springs. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 33–36 (2017).
Nguyen, S. D., Halvorsen, E. & Jensen, G. U. Wideband MEMS energy harvester driven by colored noise. J. Microelectromechan. Syst. 22, 892–900 (2013). DOI: 10.1109/JMEMS.2013.2248343
Li, J. et al. DRIE-fabricated curved-electrode zipping actuators with low pull-in voltage. In TRANSDUCERS'03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No. 03TH8664), 480–483 (2003).
Khan, S. & Ananthasuresh, G. K. Improving the sensitivity and bandwidth of in-plane capacitive microaccelerometers using compliant mechanical amplifiers. J. Microelectromech. Syst. 23, 871–887 (2014). DOI: 10.1109/JMEMS.2014.2300231
Krishnan, G. & Ananthasuresh, G. K. Evaluation and design of displacement-amplifying compliant mechanisms for sensor applications. J. Mech. Des. 130, 102304 (2008). DOI: 10.1115/1.2965599
Pedersen, C. B. W. & Seshia, A. A. On the optimization of compliant force amplifier mechanisms for surface micromachined resonant accelerometers. J. Micromech. Microeng. 14, 1281 (2004). DOI: 10.1088/0960-1317/14/10/001
S. N. Laboratories. https://www.sandia.gov/ (2020).
Lienemann, J., Rudnyi, E. B. & Korvink, J. G. MST MEMS model order reduction: requirements and benchmarks. Linear Algebra Appl. 415, 469–498 (2006). DOI: 10.1016/j.laa.2005.04.002
Baur, U. et al. Parameter preserving model order reduction for MEMS applications. Math. Comput. Model. Dyn. Syst. 17, 297–317 (2011). DOI: 10.1080/13873954.2011.547658
Kudryavtsev, M. et al. Computationally efficient and stable order reduction methods for a large-scale model of MEMS piezoelectric energy harvester. Microelectron. Reliab. 55, 747–757 (2015). DOI: 10.1016/j.microrel.2015.02.003
Bond, B. & Daniel, L. Parameterized model order reduction of nonlinear dynamical systems. in ICCAD-2005. IEEE/ACM International Conference on Computer-Aided Design, 487–494 (2005).
Zeimpekis, I., Sari, I. & Kraft, M. Characterization of a mechanical motion amplifier applied to a MEMS accelerometer. J. Microelectromech. Syst. 21, 1032–1042 (2012). DOI: 10.1109/JMEMS.2012.2196491
Ya’akobovitz, A. & Krylov, S. Toward sensitivity enhancement of MEMS accelerometers using mechanical amplification mechanism. IEEE Sens. J. 10, 1311–1319 (2010). DOI: 10.1109/JSEN.2009.2039751
Sari, I., Zeimpekis, I. & Kraft, M. A dicing free SOI process for MEMS devices. Microelectron. Eng. 95, 121–129 (2012). DOI: 10.1016/j.mee.2012.02.004
Trelea, I. C. The particle swarm optimization algorithm: convergence analysis and parameter selection. Inf. Process. Lett. 85, 317–325 (2003). DOI: 10.1016/S0020-0190(02)00447-7
Hwang, C. Simulated annealing: theory and applications. Acta Appl. Math. 12, 108–111 (1988).
Corana, A., Marchesi, M., Martini, C. & Ridella, S. Minimizing multimodal functions of continuous variables with the “simulated annealing” algorithm—Corrigenda for this article is available here. ACM Trans. Math. Softw. 13, 262–280 (1987). DOI: 10.1145/29380.29864
Sexton, R. S., Dorsey, R. E. & Johnson, J. D. Optimization of neural networks: a comparative analysis of the genetic algorithm and simulated annealing. Eur. J. Oper. Res. 114, 589–601 (1999). DOI: 10.1016/S0377-2217(98)00114-3
Ongkodjojo, A. & Tay, F. E. Global optimization and design for microelectromechanical systems devices based on simulated annealing. J. Micromech. Microeng. 12, 878 (2002). DOI: 10.1088/0960-1317/12/6/320
Ma, T. et al. A parallel denoising model for dual-mass MEMS gyroscope based on PE-ITD and SA-ELM. IEEE Access 7, 169979–169991 (2019). DOI: 10.1109/ACCESS.2019.2951612
Keymeulen, D. et al. Evolutionary computation applied to the tuning of MEMS gyroscopes. In Proc. 7th Annual Conference on Genetic and Evolutionary Computation, 927–932 (2005).
Hao, Y. et al. A rotary microgripper with locking function via a ratchet mechanism. JMiMi 26, 015008 (2016).
Crescenzi, R., Balucani, M. & Belfiore, N. P. Operational characterization of CSFH MEMS technology based hinges. J. Micromech. Microeng. 28, 055012 (2018). DOI: 10.1088/1361-6439/aaaf31
Utz, A. et al. A high-precision and high-bandwidth MEMS-based capacitive accelerometer. IEEE Sens. J. 18, 6533–6539 (2018). DOI: 10.1109/JSEN.2018.2849873
