[en] This chapter evaluated the state-of-the art MEMS sensors used for bio sensing applications. A new class of resonant micro sensor is studied. A sensor structure based on the array of weakly coupled resonators is presented. It is shown that due to the weak coupling employed between the resonators in an array manifest ultra-high sensitivity of the output to the added analytes/biomolecules. Due to the highly-precise output of such bio-sensors, minimum detectable mass in the range of sub-actogram is also possible using such MEMS sensors. Analytical modeling of such micro biosensors is presented in this chapter to understand the key performance parameters. Furthermore, role of these new classes of MEMS resonant biosensors operating at ambient temperature and/or pressure is also discussed.
