A MEMS capacitive pH sensor for high acidic and basic solutions

Capacitive; Fringing field; MEMS; PH sensor; Capacitance; Capacitive sensors; Electric fields; Natural frequencies; Capacitance values; Capacitive measurements; Fringing electric field; Fringing fields; Non- invasive measurements; Permittivity change; Resonant frequency shift

Abstract :

[en] We have developed a micro-scale chip-based pH sensing system, which can effectively measure the changes in pH ranging from 1 to 4 and 10 to 12. This method relies on fringing field capacitive measurements. A change in pH of the medium results in a permittivity change for the fringing electric field, which in turn affects the capacitance values. Capacitance changes are then converted to resonant frequency shifts via a readout circuit. This technique provides high sensitivity, low hysteresis, and low noise as well as low fabrication cost. Very importantly, the device and the corresponding measurement circuitry have the potential to be integrated in an electronic pill for continuous non-invasive measurement within the body. © 2014 IEEE.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Arefin, Md S.; Department of Electrical and Computer Systems Engineering, Monash University, Melbourne, VIC, Australia

Coskun, M. B.; Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC, Australia

Alan, T.; Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC, Australia

Neild, A.; Department of Mechanical and Aerospace Engineering, Monash University, Melbourne, VIC, Australia

Redouté, Jean-Michel ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Yuce, M. R.; Department of Electrical and Computer Systems Engineering, Monash University, Melbourne, VIC, Australia

Arregui, F. J.

Language :

English

Title :

A MEMS capacitive pH sensor for high acidic and basic solutions

Publication date :

2014

Event name :

13th IEEE SENSORS Conference, SENSORS 2014

Event date :

2 November 2014 through 5 November 2014

Audience :

International

Journal title :

Proceedings of IEEE Sensors

ISSN :

1930-0395

eISSN :

2168-9229

Publisher :

Institute of Electrical and Electronics Engineers Inc.

Volume :

2014-December

Issue :

December

Pages :

1792-1794

Peer reviewed :

Peer Reviewed verified by ORBi

Funders :

IEEE Sensors Council (SC)

Commentary :

112210

Available on ORBi :

since 02 July 2019

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Bibliography

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