[en] ManyMicro-Electro-Mechanical Systems (e.g. RF-switches, micro-resonators and micro-rotors) involve
mechanical structures moving in an electrostatic field. For this type of problems, it is required to
evaluate accurately the electrostatic forces acting on the devices. Extended Finite Element (X-FEM)
approaches can easily handle moving boundaries and interfaces in the electrostatic domain and seem
therefore very suitable to model Micro-Electro-Mechanical Systems. In this study we investigate
different X-FEM techniques to solve the electrostatic problem when the electrostatic domain is
bounded by a conducting material. Preliminary studies in one-dimension have shown that one can
obtain good results in the computation of electrostatic potential using X-FEM. In this paper the
extension of these preliminary studies to 2D problem is presented. In particular a new type of
enrichment functions is proposed in order to treat accurately Dirichlet boundary conditions on the
interface.
Disciplines :
Aerospace & aeronautics engineering
Author, co-author :
Rochus, Véronique ; Delft University of Technology > Faculty 3mE, Dpt. of Precision and Microsystems Engineering > Engineering Dynamics
Rixen, Daniel; Delft University of Technology > Faculty 3mE, Dpt. of Precision and Microsystems Engineering > Engineering Dynamics
Van Miegroet, Laurent ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Ingénierie des véhicules terrestres
Duysinx, Pierre ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Ingénierie des véhicules terrestres
Language :
English
Title :
Electrostatic Simulation using XFEM for Conductor and Dielectric Interfaces
Publication date :
2011
Journal title :
International Journal for Numerical Methods in Engineering
ISSN :
0029-5981
eISSN :
1097-0207
Publisher :
John Wiley & Sons, Inc, Chichester, United Kingdom
scite shows how a scientific paper has been cited by providing the context of the citation, a classification describing whether it supports, mentions, or contrasts the cited claim, and a label indicating in which section the citation was made.
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