[en] In micro-electromechanical systems (MEMS), coupling of structures through electrostatic forces
is a primordial phenomenon. Simulating the dynamics of MEMS and taking into account such strong coupling effects allows one to predict dynamical performance and stability, and is therefore an essential issue in the design of highly effective and reliable devices. Analysis techniques for such systems require special attention in order to provide to the designer accurate and fast tools.We propose a finite element approach (FEM) that properly handles the strong electromechanical coupling in MEMS.
In the simulation example of a micro-bridge, we show that such simulation techniques can reveal
complex dynamical behaviors of MEMS such as dynamic pull-in.
Disciplines :
Mathematics Mechanical engineering
Author, co-author :
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rixen, Daniel J.; TU-Delft, Faculty of Design, Engineering and Production, Engineering Mechanics—Dynamics, Mekelweg 2, Delft, 2628 CD, The Netherlands
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Electrostatic coupling of MEMS structures: transient simulations and dynamic pull-in
Publication date :
2005
Journal title :
Nonlinear Analysis: Theory, Methods and Applications
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