[en] Experimental investigations of mechanical and tribological properties of thin films using an atomic force microscope and its combination with nanoidentation are presented in this paper. The normal mode of an atomic force microscope is used to measure the stiffness and hardness of thin films which are tribologically characterized by roughness, nano-scale adhesion forces and friction forces. The friction forces are measured using the lateral force mode of atomic force microscope. In order to measure the adhesion forces of thin films, spectroscopy in point with atomic force microscope was performed. Direct measurement of tribological and mechanical behaviour of thin films is important to increase the lifetime of microstructures which use thin films for friction and stiction reduction of microsystems.
Disciplines :
Materials science & engineering
Author, co-author :
Pustan, Marius ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Wu, Ling ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Noels, Ludovic ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Evaluation of Tribo-Mechanical Properties of Thin Films Using Atomic Force Microscope
This website uses cookies to improve user experience. Read more
Save & Close
Accept all
Decline all
Show detailsHide details
Cookie declaration
About cookies
Strictly necessary
Performance
Strictly necessary cookies allow core website functionality such as user login and account management. The website cannot be used properly without strictly necessary cookies.
This cookie is used by Cookie-Script.com service to remember visitor cookie consent preferences. It is necessary for Cookie-Script.com cookie banner to work properly.
Performance cookies are used to see how visitors use the website, eg. analytics cookies. Those cookies cannot be used to directly identify a certain visitor.
Used to store the attribution information, the referrer initially used to visit the website
Cookies are small text files that are placed on your computer by websites that you visit. Websites use cookies to help users navigate efficiently and perform certain functions. Cookies that are required for the website to operate properly are allowed to be set without your permission. All other cookies need to be approved before they can be set in the browser.
You can change your consent to cookie usage at any time on our Privacy Policy page.