Rutherford backscattering; Sputter deposition; Thin film deposition; Magnetooptical effects
Abstract :
[en] DyFeCo alloys offer suitable properties for magneto-optical recording. Their high write and erase sensitivity favors them as
materials to design high density multilayer-based recording medium that would be addressed by temperature and field
modulation. The samples consist of amorphous thin films of the order of 100 nm deposited by RF magnetron sputtering
between an aluminum buffer and a thin aluminum native oxide capping layer onto Si or SiO2 substrates. The stoichiometry
of these films has to be known in order to study their magnetic properties. Unfortunately, the analysis of this kind of sample
is not obvious neither by RBS or PIXE. Indeed, as Fe and Co are neighbor elements, the RBS spectra do not allow to
determine their elementary ratio. On the other hand, PIXE spectra are difficult to analyze due to the overlapping of the
different peaks. By combining the two methods it has been possible to obtain the thickness and the stoichiometry of these
samples. The experimental setup as well as the computation method used to attain this goal will be also described.
Disciplines :
Chemistry Physics
Author, co-author :
Strivay, David ; Université de Liège > Département de physique > Spectroscopie atomique et nucléaire, archéométrie
Weber, Georges ; Université de Liège > Centre européen en archéométrie
