Combination of Phase-Shifting Interferometry and Ellipsometry for Absorbing Nanofilm Thickness Measurements

Fleury-Frenette, Karl; Rabecki, Frédéric; Dubreuil, Olivier

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Combination of Phase-Shifting Interferometry and Ellipsometry for Absorbing Nanofilm Thickness Measurements

Fleury-Frenette, Karl; Rabecki, Frédéric; Dubreuil, Olivier

2016

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https://hdl.handle.net/2268/206229

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Keywords :

thin films thickness; phase-shift interferometry; ellipsometry

Research Center/Unit :

Surface Micro & Nano Engineering Lab

Disciplines :

Physics

Author, co-author :

Fleury-Frenette, Karl ; Université de Liège > CSL (Centre Spatial de Liège)

Rabecki, Frédéric ; Université de Liège > CSL (Centre Spatial de Liège)

Dubreuil, Olivier ; Université de Liège > CSL (Centre Spatial de Liège)

Language :

English

Title :

Combination of Phase-Shifting Interferometry and Ellipsometry for Absorbing Nanofilm Thickness Measurements

Publication date :

19 October 2016

Number of pages :

Event name :

European Conference on Nanofilms

Event organizer :

IK4Tekniker

Event place :

Bilbao, Spain

Event date :

from 19-10-2016 to 21-10-2016

Available on ORBi :

since 27 January 2017

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