Reference : A Stochastic Multi-Scale Approach for the Modeling of Thermo-Elastic Damping in Micro...
Scientific journals : Article
Engineering, computing & technology : Mechanical engineering
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/201256
A Stochastic Multi-Scale Approach for the Modeling of Thermo-Elastic Damping in Micro-Resonators
English
Wu, Ling mailto [Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Lucas, Vincent mailto [Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Nguyen, Van Dung mailto [Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
Golinval, Jean-Claude mailto [Université de Liège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Paquay, Stéphane [Open Engineering SA > > > >]
Noels, Ludovic mailto [Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
1-Oct-2016
Computer Methods in Applied Mechanics & Engineering
Elsevier Science
310
802-839
Yes (verified by ORBi)
International
0045-7825
Lausanne
Switzerland
[en] Thermo-elasticity ; Quality factor ; Stochastic Multi-scale ; MEMS ; Polycrystalline ; LIMARC
[en] The aim of this work is to study the thermo-elastic quality factor (Q) of micro-resonators with a stochastic multi-scale approach. In the design of high-Q micro-resonators, thermo-elastic damping is one of the major dissipation mechanisms, which may have detrimental effects on the quality factor, and has to be predicted accurately. Since material uncertainties are inherent to and unavoidable in micro-electromechanical systems (MEMS), the effects of those variations have to be considered in the modeling in order to ensure the required MEMS performance. To this end, a coupled thermo-mechanical stochastic multi-scale approach is developed in this paper. Thermo-mechanical micro-models of polycrystalline materials are used to represent micro-structure realizations. A computational homogenization procedure is then applied on these statistical
volume elements to obtain the stochastic characterizations of the elasticity tensor, thermal expansion, and conductivity tensors at the meso-scale. Spatially correlated meso-scale random fields can thus be generated to represent the stochastic behavior of the homogenized material properties. Finally, the distribution of the thermo-elastic quality factor of MEMS resonators is studied through a stochastic finite element method using as input the generated stochastic random field.
Computational & Multiscale Mechanics of Materials
Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) in the context of the ERA-NET MNT framework.
Researchers ; Professionals
http://hdl.handle.net/2268/201256
10.1016/j.cma.2016.07.042
http://dx.doi.org/10.1016/j.cma.2016.07.042
NOTICE: this is the author’s version of a work that was accepted for publication in Computer Methods in Applied Mechanics and Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Computer Methods in Applied Mechanics and Engineering 310 (2016) 802-839, DOI: 10.1016/j.cma.2016.07.042

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