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Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process
Wood, Graham; Chun, Zhao; Pu, Suan et al.
2015In Proceedings 41st Micro and Nano Engineering Conference
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Wood, Graham
Chun, Zhao
Pu, Suan
Boden, Stuart
Sari, Ibrahim
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process
Publication date :
September 2015
Event name :
41st Micro and Nano Engineering Conference
Event date :
September 2015
Audience :
International
Main work title :
Proceedings 41st Micro and Nano Engineering Conference
Peer reviewed :
Peer reviewed
Available on ORBi :
since 08 July 2016

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