Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review

Chen, Fang; Li, Xinxin; Kraft, Michael

doi:10.1109/JSEN.2016.2582198

Article (Scientific journals)

Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review

Chen, Fang; Li, Xinxin; Kraft, Michael

2016 • In IEEE Sensors Journal

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https://hdl.handle.net/2268/200032

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10.1109/JSEN.2016.2582198

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Abstract :

[en] Analog-to-digital converters (ADC) based on sigma-delta modulators (SDM) are a popular choice for high resolution conversion from the analog to the digital domain. With relatively small modifications they also can be used as electromechanical SDM (EM-SDM) force feedback interfaces for capacitive micro-electromechanical systems (MEMS) inertial sensors. Such interfaces are able to combine the benefits of force feedback and analog to digital conversion at relatively modest circuit cost. This paper provides a comprehensive review of EM-SDM interfaces for capacitive MEMS inertial sensors. The principle and design methodology of EM-SDM interfaces are introduced. A classification of EM-SDMaccelerometers and gyroscopes is presented, and a detailed analysis of different EM-SDMarchitectures is given. The most representative EM-SDM inertial sensors systems are discussed and compared with regard to their performance characteristics. In particular, the properties of various discrete and continuous-time techniques and a system parameter optimization methodology are illustrated through specific examples. Finally, current challenges and future development trends of EM-SDM interfaces for inertial sensors have been identified.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Chen, Fang

Li, Xinxin

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review

Publication date :

2016

Journal title :

IEEE Sensors Journal

ISSN :

1530-437X

eISSN :

1558-1748

Publisher :

Institute of Electrical and Electronics Engineers, New York, United States - New York

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 08 July 2016

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