Abstract :
[en] Analog-to-digital converters (ADC) based on sigma-delta modulators (SDM) are a popular choice for high resolution conversion from the analog to the digital domain. With relatively small modifications they also can be used as electromechanical SDM (EM-SDM) force feedback interfaces for capacitive micro-electromechanical systems (MEMS) inertial sensors. Such interfaces are able to combine the benefits of force feedback and analog to digital conversion at relatively modest circuit cost. This paper provides a comprehensive review of EM-SDM interfaces for capacitive MEMS inertial sensors. The principle and design methodology of EM-SDM interfaces are introduced. A classification of EM-SDMaccelerometers and gyroscopes is presented, and a detailed analysis of different EM-SDMarchitectures is given. The most representative EM-SDM inertial sensors systems are discussed and compared with regard to their performance characteristics. In particular, the properties of various discrete and continuous-time techniques and a system parameter optimization methodology are illustrated
through specific examples. Finally, current challenges and future development trends of EM-SDM interfaces for inertial sensors have been identified.
Scopus citations®
without self-citations
65