Article (Scientific journals)
Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review
Chen, Fang; Li, Xinxin; Kraft, Michael
2016In IEEE Sensors Journal
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Abstract :
[en] Analog-to-digital converters (ADC) based on sigma-delta modulators (SDM) are a popular choice for high resolution conversion from the analog to the digital domain. With relatively small modifications they also can be used as electromechanical SDM (EM-SDM) force feedback interfaces for capacitive micro-electromechanical systems (MEMS) inertial sensors. Such interfaces are able to combine the benefits of force feedback and analog to digital conversion at relatively modest circuit cost. This paper provides a comprehensive review of EM-SDM interfaces for capacitive MEMS inertial sensors. The principle and design methodology of EM-SDM interfaces are introduced. A classification of EM-SDMaccelerometers and gyroscopes is presented, and a detailed analysis of different EM-SDMarchitectures is given. The most representative EM-SDM inertial sensors systems are discussed and compared with regard to their performance characteristics. In particular, the properties of various discrete and continuous-time techniques and a system parameter optimization methodology are illustrated through specific examples. Finally, current challenges and future development trends of EM-SDM interfaces for inertial sensors have been identified.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Chen, Fang
Li, Xinxin
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Electromechanical Sigma-Delta Modulators (EMSDM) force feedback interfaces for capacitive MEMS inertial sensors: a review
Publication date :
2016
Journal title :
IEEE Sensors Journal
ISSN :
1530-437X
eISSN :
1558-1748
Publisher :
Institute of Electrical and Electronics Engineers, New York, United States - New York
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 08 July 2016

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