Mechanically-coupled ring-resonator filter and array (analytical and finite element model).

[en] In this paper, a design of two microelectromechanical systems based devices is carried out using an analytical and finite-element analysis. The first device is mechanically coupled ring-resonator band-pass filter with centre frequency of 4.4 MHz and a small bandwidth of only 36 kHz. Flexural-mode ring resonators have been mechanically coupled using soft mechanical spring for realising the filtering action. Owing to inherent symmetry in the ring structure, simple approach is used to access a low-velocity coupling locations to set a smallest possible bandwidth. The authors also show a reduction in the amplitude of spurious mode by accentuating the filter structure in its fully differential mode inherently present in the structure. Moreover, the effect of the number of the support beams and structural damping on the frequency response of a filter has been analysed. A second device is mechanically coupled ring-resonator arrays with varying number of rings coupled. The mechanical links using short stubs connect each constituent resonator of an array to its adjacent ones at the high-velocity vibrating locations to accentuate the desired mode and reject all other spurious modes. Both analytical and finite-element based simulation results for parameters of the designed structure are found in good agreement.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Pachkawade, Vinayak ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Junghare, R

Patrikar, R

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Mechanically-coupled ring-resonator filter and array (analytical and finite element model).

Publication date :

2016

Journal title :

IET Computers and Digital Techniques

ISSN :

1751-8601

eISSN :

1751-861X

Publisher :

Institution of Engineering & Technology

Peer reviewed :

Peer Reviewed verified by ORBi

Available on ORBi :

since 08 July 2016

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Bibliography

Nguyen, C.T.C.: 'Vibrating RF MEMS overview: applications to wireless communications'. Proc., Photonics West: MOEMS-MEMS 2005, San Jose, CA, 22-27 January 2005, paper no. 5715-201
Nguyen, C.T.C.: 'Micromechanical filters for miniaturized low-power communications'. Proc. of SPIE: Smart Structures and Materials (Smart Electronics and MEMS), Newport Beach, CA, 1-5 March 1999
Crespin, E.R.: 'Fully integrated switchable filter banks'. IEEE Int. Microwave Symp., June 2012, pp. 1-3
Wong, A.C., Clark, J.R., Nguyen, C.T.C.: 'Anneal-activated, tunable, 65 MHz micromechanical filters'. Digest of Technical Papers, 10th Int. Conf. on Solid-State Sensors and Actuators, Sendai, Japan, 7-10 June 1999, pp. 1390-1393
Kim, B., Olsson III, R.H., Wojciechowski, K.E.: 'AlN microresonator-based filters with multiple bandwidths at low inter-mediate frequencies', J. Microelectromech. Syst., 2013, 22, (4), pp. 949-961
Gong, S., Piazza, G.: 'Design and analysis of lithium-niobate-based high electromechanical coupling RF-MEMS resonators for wide-band filtering', IEEE Trans. Microw. Theory Technol., 2013, 61, (1), pp. 403-414
Burgess, J.: 'Mechanical filters in electronics', IEEE Trans. Acoust. Speech signal Process., 1984, 32, (1), p. 191
Wang, K., Nguyen, C.T.C.: 'High-order medium frequency micromechanical electronic filters', J. Microelectromech. Syst., 1999, 8, (4), pp. 534-556
Wang, J., Ren, Z., Nguyen, C.T.C.: 'Self-aligned 1.14 GHz vibrating radial-mode disk resonators'. Digest of Technical Papers, the 12th Int. Conf. on Solid-State Sensors & Actuators (Transducers'03), Boston, MA, 8-12 June 2003, pp. 947-950
Greywall, D.S., Busch, P.A.: 'Coupled micromechanical drumhead resonators with practical applications as electromechanical bandpass filters', J. Micromech. Microeng., 2002, 12, (6), pp. 925-938
Clark, J.R., Hsu, W.T., Nguyen, C.T.C.: 'High-Q VHF micromechanical contour-mode disk resonators'. Electron Devices Meeting, Technical Digest Int., 10-13 December 2000, pp. 493-496
Abdelmoneum, M.A., Demirci, M.U., Nguyen, C.T.C.: 'Stemless wine-glass-mode disk micromechanical resonators'. The 16th Annual Int. Conf. on MicroElectro Mechanical Systems, MEMS-03 Kyoto, 19-23 January 2003, pp. 698-701
Li, S.S., Lin, Y.W., Ren, Z., et al.: 'An MSI micromechanical differential disk-array filter'. Digest of Technical Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers'07), Lyon, France, 10-14 June 2007, pp. 307-311
Pourkamali, S., Abdolvand, R., Ayazi, F.: 'A 600 kHz electrically coupled MEMS bandpass filter'. Proc., IEEE 16th Int. Conf. on MicroElectroMechanical Systems (MEMS), Kyoto, Japan, January 2003, pp. 702-705
Chen, C.Y., Li, M.H., Chin, C.H., et al.: 'Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters'. Proc., IEEE 27th Int. Conf. on MicroElectroMechanical Systems (MEMS), San Francisco, CA, USA, January 2014, pp. 1249-1252
Bannon, F.D. III, Clark, J.R., Nguyen, C.T.C.: 'High-Q HF microelectromechanical filters', IEEE J. Solid-Stare Circuits, 2000, 35, (4), pp. 512-526
Lopez, J.L., Verd, J., Uranga, A., et al.: 'A CMOS-MEMS RF-tunable bandpass filter based on two high-Q 22 MHz polysilicon clamped-clamped beam resonators', IEEE Electron Device Lett., 2009, 30, (7), pp. 718-720
Li, M.H., Chen, W.C., Li, S.S.: 'Mechanically coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability', IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2012, 59, (3), pp. 346-357
Demirci, M., Nguyen, C.T.C.: 'Mechanically corner-coupled square microresonator array for reduced series motional resistance', IEEE/ASME J. Microelectromech. Syst., 2006, 15, (6), pp. 1419-1436
Lee, S., Nguyen, C.T.C.: 'Mechanically-coupled micromechanical arrays for improved phase noise'. Proc., Joint Conf. on IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control, 50th Anniversary, Montreal, Canada, August 2004, pp. 280-286
Pachkawade, V., Li, C.S., Li, S.S.: 'A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier'. IEEE Sensors, Taipei, Taiwan, 28-31 October 2012, pp. 1-4
Shalaby, M., Abdelmoneum, M., Saitou, K.: 'Design of spring coupling for high Q, high frequency MEMS filters'. ASME 2006 Int. Mechanical Engineering Congress and Exposition Microelectromechanical Systems Chicago, IL, USA, 5-10 November 2006
Bindel, D.S., Govindjee, S.: 'Elastic PMLs for resonator anchor loss simulation', Int. J. Numer. Methods Eng., 2005, pp. 789-818
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