D. Crescini, D, Marioli, A. Taroni, Low-cost accelerometers: two examples in thick-film technology, Sensors and Actuators A 55 (1996) 79-85.
L. Spangler, C.J. Kemp, ISAAC: integrated silicon automotive accelerometer, Sensors and Actuators A 54 (1996) 523-529.
W. Kuehnel, S. Sherman, A surface micromachined silicon accelerometer with on-chip detection circuitry, Sensors and Actuators A 45 (1994) 7-16.
F. Goodenough, Airbags boom when IC accelerometer sees 50, Electron. Design 8 (1991) 45-56.
J.B. Starr, Squeeze-film damping in solid state accelerometers, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1990, pp. 44-47.
S. Marco, J. Samitier, O, Ruiz, A. Herms, J. Morante, Analysis of electrostatic damped piezoresistive silicon accelerometer, Sensors and Actuators A 37-38 (1993) 317-322.
E. Peeters, S. Vergote, B. Puers, W. Sansen, A highly symmetrical capacitive microaccelerometer with single degree of freedom response, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp. 97-100.
C.P. Lewis, M. Kraft, T.G. Hesketh, Mathematical model for a micromachined accelerometer, Trans. Inst. Meas. Control 18 (2) (1996) 92-98.
K. Chau, S.R. Lewis, Y. Zhao, R.T. Howe, S.F. Bart, R.G. Marcheselli, An integrated force balanced capacitive accelerometer for low-g applications, Sensors and Actuators A 54 (1996) 472-476.
T. Petsche, Entwicklung eines mikromechnischen Servo-Beschleunigungs-aufnehmers, Sensor '97 Int. Fair and Congress, Nürnberg, Germany, 1997, vol. 1, paper A3.3, pp. 55-60.
R.P. vanKampen, M. Vellekoop, P. Sarro, R.F. Wolffenbuttel, Application of electrostatic feedback to critical damping of an integrated silicon accelerometer, Sensors and Actuators A 43 (1994) 100-106.
L. Zimmermann, J. Ebersohl, F. Le Hung, J.P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, P. Caillat, Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability, Sensors and Actuators A 46-47 (1995) 190-195.
W. Yun, R.T. Howe, P. Gray, Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1992, pp. 126-131.
W. Henrion, L. Disanza, M. Ip, S. Terry, H. Jerman, Wide dynamic range direct digital accelerometer, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1990, pp. 153-157.
T. Smith, O. Nys, M. Chevroulet, Y. deCoulon, M. Degrauwe, Electromechanical sigmadelta converter for acceleration measurements, IEEE International Solid-State Circuits Conf., San Francisco, CA, USA, 1994, pp. 160-161.
C. Lu, M. Lemkin, B. Boser, A monolithic surface micromachined accelerometer with digital output, IEEE J. Solid-State Circuits 30 (12) (1995) 1367-1373.
S. Wuestling, O. Fromheim, H. Gemmeke, M. Tschuch, O. Wollersheim, Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCs, Sensors and Actuators A 61 (1997) 436-440.
A. Burstein, W. J. Kaiser, Mixed analog-digital highly sensitive sensor interface circuit for low-cost microsensors, Sensors and Actuators A 52 (1996) 193-197.
