Article (Scientific journals)
Closed-loop silicon accelerometers
Kraft, Michaël; Lewis, Christopher P.; Hesketh, Thomas G.
1998In IEE Proceedings. Circuits, Devices and Systems, 145 (5), p. 325-331
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Abstract :
[en] The control-system structure and behaviour are considered for an analogue and a digital servo-accelerometer having a dynamic range from mg to several g (1g=9.81 ms<sup>-2</sup>), for use in low-frequency applications. The paper emphasises the derivation of mathematical models, which are presented together with simulated and test results obtained from the implementation of these strategies on a bulk-micromachined silicon sensing element employing capacitive signal pick-off. The digital device, which is based upon oversampling conversion, proved to have superior stability compared to the analogue accelerometer. Furthermore, it has the advantages of producing a direct digital output signal and an inherent self-test feature
Disciplines :
Electrical & electronics engineering
Author, co-author :
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Lewis, Christopher P.
Hesketh, Thomas G.
Language :
English
Title :
Closed-loop silicon accelerometers
Publication date :
1998
Journal title :
IEE Proceedings. Circuits, Devices and Systems
ISSN :
1350-2409
Publisher :
Institute of Electrical Engineers, United Kingdom
Volume :
145
Issue :
5
Pages :
325-331
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 08 July 2016

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