Closed-loop silicon accelerometers

[en] The control-system structure and behaviour are considered for an analogue and a digital servo-accelerometer having a dynamic range from mg to several g (1g=9.81 ms<sup>-2</sup>), for use in low-frequency applications. The paper emphasises the derivation of mathematical models, which are presented together with simulated and test results obtained from the implementation of these strategies on a bulk-micromachined silicon sensing element employing capacitive signal pick-off. The digital device, which is based upon oversampling conversion, proved to have superior stability compared to the analogue accelerometer. Furthermore, it has the advantages of producing a direct digital output signal and an inherent self-test feature

Disciplines :

Electrical & electronics engineering

Author, co-author :

Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Lewis, Christopher P.

Hesketh, Thomas G.

Language :

English

Title :

Closed-loop silicon accelerometers

Publication date :

1998

Journal title :

IEE Proceedings. Circuits, Devices and Systems

ISSN :

1350-2409

Publisher :

Institute of Electrical Engineers, United Kingdom

Volume :

145

Issue :

Pages :

325-331

Peer reviewed :

Peer Reviewed verified by ORBi

Additional URL :

http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=739675

Available on ORBi :

since 08 July 2016

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Bibliography

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