Electroplating moulds using dry film thick negative photoresist

This paper reports on progress on the feasibility of fabricating moulds for
electroplating using Ordyl P-50100 (negative) acrylate polymer based dry
film photoresist, commercially available from Elga Europe
(http://www.elgaeurope.it). We used this photoresist as an alternative to
SU8 negative epoxy based photoresist, which is very difficult to process and
remove after electroplating (Lorenz et al 1998 Microelectron. Eng. 41/42
371–4, Eyre et al 1998 Proc. MEMS’98 (Heidelberg) (Piscataway,
NJ: IEEE) pp 218–22). Ordyl P-50100 is easy to work with and can be
easily removed after processing. A single layer of Ordyl P-50100 was
deposited by lamination up to 20 µm thickness. Thicker layers (200 µm and
more) can be achieved with multilayer lamination using a manual laminator.
For our applications we found that Ordyl P-50100 dry film photoresist is a
very good alternative to SU8 for the realization of 100 µm high moulds.
The results presented will open up new possibilities for low-cost LIGA-type
processes for MEMS applications.