Modelling and analysis of a MEMS approach to dc voltage step-up conversion

This paper studies the principle of a novel voltage step-up converter based
on a micromachined variable parallel-plate capacitor in combination with an
electrostatic actuator. Electrical equivalent circuit and system-level
SIMULINK models have been developed. Based on these models, an
analysis of design parameters and expected device performance has been
performed to serve as a starting point for a prototype implementation.
Possible areas of application are self-powered, stand-alone sensing systems,
aerospace applications and any kind of electrostatic or piezoelectric MEMS
devices in general.