[en] This paper studies the principle of a novel voltage step-up converter based
on a micromachined variable parallel-plate capacitor in combination with an
electrostatic actuator. Electrical equivalent circuit and system-level
SIMULINK models have been developed. Based on these models, an
analysis of design parameters and expected device performance has been
performed to serve as a starting point for a prototype implementation.
Possible areas of application are self-powered, stand-alone sensing systems,
aerospace applications and any kind of electrostatic or piezoelectric MEMS
devices in general.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Haas, C. H.
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Modelling and analysis of a MEMS approach to dc voltage step-up conversion
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