Article (Scientific journals)
A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
Gollasch, Carsten O.; Moktadir, Zakaria; Kraft, Michaël et al.
2005In Journal of Micromechanics and Microengineering, 15 (7), p. 39-S46
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Abstract :
[en] A micromachined three-dimensional electrostatic actuator that is optimized for aligning and tuning optical microcavities on atom chips is presented. The design of the 3D actuator is outlined in detail, and its characteristics are verified by analytical calculations and finite element modelling. Furthermore, the fabrication process of the actuation device is described and preliminary fabrication results are shown. The actuation in the chip plane which is used for mirror positioning has a working envelope of 17.5 µm. The design incorporates a unique locking mechanism which allows the out-of-plane actuation that is used for cavity tuning to be carried out once the in-plane actuation is completed. A maximum translation of 7 µm can be achieved in the out-of-plane direction.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Gollasch, Carsten O.
Moktadir, Zakaria
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Trupke, Michael
Eriksson, S.
Hinds, Edward A.
Language :
English
Title :
A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips
Publication date :
2005
Journal title :
Journal of Micromechanics and Microengineering
ISSN :
0960-1317
Publisher :
Institute of Physics Publishing, United Kingdom
Volume :
15
Issue :
7
Pages :
S39-S46
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 07 July 2016

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