Article (Scientific journals)
Non-conforming element for accurate modelling of MEMS
Rochus, Véronique; Rixen, Daniel J.; Golinval, Jean-Claude
2007In Finite Elements in Analysis and Design, 43 (10), p. 749-756
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Keywords :
MEMS; electro-mechanical coupling; non-conforming elements; finite element modelling; non-linear structural analysis
Abstract :
[en] In this work different modelling techniques are investigated to simulate the dynamic behaviour of slender structures on which electrostatic forces are acting. In particular, non-conforming elements are tested to model micro- mechanical devices (or MEMS) having a very large aspect ratio. These elements are constructed on linear shape functions enriched by internal second-order polynomials. As a consequence the element compatibility is not exactly satisfied, but such elements can efficiently model beam- or shell-like structures with a small number of degrees of freedom. The advantage of non-conforming elements compared to shell or beam elements is that they are volume elements and can therefore easily be combined with other volume finite elements. For micro-mechanical systems the structure must be coupled to the electrostatic domain with the so-called electro-mechanical elements that solve for the electrostatic potential and generate the electrostatic forces. This paper shows that constructing coupled electro-mechanical models for high aspect ratio systems is then greatly simplified when non-conforming finite elements are used. The theory is presented for small deformations and also for large displacements where geometric non-linearities must be accounted for. The elements proposed in this paper are based on non-conforming formulations published earlier. The efficiency of the non-conforming approach combined with specific electro-mechanical elements is highlighted in the analysis of two simple MEMS for which the pull-in voltage is computed. (C) 2007 Elsevier B.V. All rights reserved.
Disciplines :
Physics
Mechanical engineering
Mathematics
Author, co-author :
Rochus, Véronique ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rixen, Daniel J.;  TU-Delft, Faculty of Design, Engineering and Production, Engineering Mechanics–Dynamics, Mekelweg 2, Delft 2628 CD, The Netherlands
Golinval, Jean-Claude  ;  Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Non-conforming element for accurate modelling of MEMS
Publication date :
July 2007
Journal title :
Finite Elements in Analysis and Design
ISSN :
0168-874X
eISSN :
1872-6925
Publisher :
Elsevier Science Bv, Amsterdam, Netherlands
Volume :
43
Issue :
10
Pages :
749-756
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 26 August 2009

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