electro-mechanical coupling; monolithic schemes; finite element method; micro-electromechanical systems
Abstract :
[en] The purpose of the present work is to model and to simulate the Coupling between the electric and mechanical fields. A new finite element approach is proposed to model strong electro-mechanical coupling in micro-structures with capacitive effect. The proposed approach is based oil it monolithic formulation: the electric and the mechanical fields are solved simultaneously in the same formulation. This method provides a tangent stiffness matrix for the total coupled problem which allows to determine accurately the pull-in voltage and the natural frequency of electro-mechanical systems such as MEMs. To illustrate the methodology results are Shown For the analysis of a micro-bridge. Copyright (c) 2005 John Wiley
Disciplines :
Mathematics Engineering, computing & technology: Multidisciplinary, general & others
Author, co-author :
Rochus, Véronique ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Rixen, D. J.; 2TU-Delft, Faculty of Design, Engineering and Production, Engineering Dynamics, Mekelweg 2, Delft 2628 CD, The Netherlands
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Language :
English
Title :
Monolithic modelling of electro-mechanical coupling in micro-structures
Publication date :
22 January 2006
Journal title :
International Journal for Numerical Methods in Engineering
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