[en] As the size of the device is only one or two orders of magnitude higher than the size of the grains, the structural properties, such as the thermo-elastic quality factor (Q), of micro-electro-mechanical systems (MEMS) made of poly- crystalline materials exhibit a scatter, due to the existing randomness in the grain size, grain orientation, surface roughness. In order to predict the probabilistic behavior of micro-resonators, the authors extend herein a previously developed stochastic 3-scale approach to the case of thermoelastic damping. In this method, stochastic volume elements (SVEs) are defined by considering random grain orientations in a tessellation. For each SVE realization, the mesoscopic apparent elasticity tensor, thermal conductivity tensor, and thermal dilatation tensor can be obtained using thermo-mechanical computational homogenization theory. The extracted mesoscopic apparent properties tensors can then be used to define a spatially correlated mesoscale random field, which is in turn used as input for stochastic finite element simulations. As a result, the probabilistic distribution of the quality factor of micro-resonator can be extracted by considering Monte-Carlo simulations of coarse-meshed micro-resonators, accounting implicitly for the random microstructure of the poly-silicon material.
Wu, Ling ; Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Lucas, Vincent ; Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Nguyen, Van Dung ; Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Paquay, Stéphane; Open Engineering
Golinval, Jean-Claude ; Université de Liège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Noels, Ludovic ; Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Voicu, Rodica; IMT Bucharest
Baracu, Angela; IMT Bucharest
Muller, Raluca; IMT Bucharest
Language :
English
Title :
Probabilistic prediction of the quality factor of micro-resonator using a stochastic thermo-mechanical multi-scale approach
Publication date :
23 May 2016
Event name :
SMMEG Seminar Series (engs solid mechanics seminars)
Event organizer :
University of Oxford
Event place :
Oxford, United Kingdom
Event date :
23-05-2016
Name of the research project :
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) and by Romanian UEFISCDI Agency contract ERA-NET MNT no 7-063/2012 (20122015) in the context of the ERA-NET MNT framework
Funders :
Région wallonne UEFISCDI - Unitatea Executiva pentru Finantarea Invatamantului Superior a Cercetarii Dezvoltarii si Inovarii
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